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PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90480D (April 17, 2014);  doi:10.1117/12.2046776

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90480E (April 17, 2014);  doi:10.1117/12.2045566

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90480S (April 17, 2014);  doi:10.1117/12.2046132

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 904813 (April 17, 2014);  doi:10.1117/12.2046423

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90481V (April 17, 2014);  doi:10.1117/12.2045732

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90482I (April 17, 2014);  doi:10.1117/12.2046378

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 904835 (April 17, 2014);  doi:10.1117/12.2048195

Proceedings Volume 9061 (Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014) >
April 10, 2014
Proc SPIE. 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014, 906136 (April 10, 2014);  doi:10.1117/12.2045199

Proceedings Volume 9062 (Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014) >
April 10, 2014
Proc SPIE. 9062, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014, 90620N (April 10, 2014);  doi:10.1117/12.2044718

Optical Engineering  |  Special Section on High-Speed 3-D Optical Metrology and Applications
April 09, 2014
Opt. Eng. 53 (11), 112207 (April 09, 2014);  doi:10.1117/1.OE.53.11.112207

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