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Lithography & Microelectronics

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9170 (Nanoengineering: Fabrication, Properties, Optics, and Devices XI) >
August 28, 2014
Proc SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91700C (August 28, 2014);  doi:10.1117/12.2060925

Proceedings Volume 9170 (Nanoengineering: Fabrication, Properties, Optics, and Devices XI) >
August 28, 2014
Proc SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 917010 (August 28, 2014);  doi:10.1117/12.2061230

Proceedings Volume 9170 (Nanoengineering: Fabrication, Properties, Optics, and Devices XI) >
August 28, 2014
Proc SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 917018 (August 28, 2014);  doi:10.1117/12.2058669

Proceedings Volume 9170 (Nanoengineering: Fabrication, Properties, Optics, and Devices XI) >
August 28, 2014
Proc SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91701I (August 28, 2014);  doi:10.1117/12.2061191

Proceedings Volume 9167 (Spintronics VII) >
August 28, 2014
Proc SPIE. 9167, Spintronics VII, 91671B (August 28, 2014);  doi:10.1117/12.2063079

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 28, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033012 (August 28, 2014);  doi:10.1117/1.JMM.13.3.033012

Proceedings Volume 9173 (Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII) >
August 27, 2014
Proc SPIE. 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 91730A (August 27, 2014);  doi:10.1117/12.2060227

Proceedings Volume 9172 (Nanostructured Thin Films VII) >
August 27, 2014
Proc SPIE. 9172, Nanostructured Thin Films VII, 91720V (August 27, 2014);  doi:10.1117/12.2059673

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 27, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033010 (August 27, 2014);  doi:10.1117/1.JMM.13.3.033010

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 27, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033011 (August 27, 2014);  doi:10.1117/1.JMM.13.3.033011

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