Lithography & Microelectronics

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9994 (Optical Materials and Biomaterials in Security and Defence Systems Technology XIII) >
December 05, 2016
Proc SPIE. 9994, Optical Materials and Biomaterials in Security and Defence Systems Technology XIII, 99940F (December 5, 2016);  doi:10.1117/12.2243450

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Editorial
December 02, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (4), 040101 (December 02, 2016);  doi:10.1117/1.JMM.15.4.040101
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Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
November 30, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (4), 043508 (November 30, 2016);  doi:10.1117/1.JMM.15.4.043508

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microelectromechanical Systems (MEMS)
November 29, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (4), 045003 (November 29, 2016);  doi:10.1117/1.JMM.15.4.045003

Proceedings Volume 10023 (Optical Metrology and Inspection for Industrial Applications IV) >
November 24, 2016
Proc SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230D (November 24, 2016);  doi:10.1117/12.2254870

Proceedings Volume 10023 (Optical Metrology and Inspection for Industrial Applications IV) >
November 24, 2016
Proc SPIE. 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230P (November 24, 2016);  doi:10.1117/12.2247807

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
November 18, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (4), 043507 (November 18, 2016);  doi:10.1117/1.JMM.15.4.043507

Proceedings Volume 9985 (Photomask Technology 2016) >
November 17, 2016
Proc SPIE. 9985, Photomask Technology 2016, 99850N (November 17, 2016);  doi:10.1117/12.2240956

Proceedings Volume 9985 (Photomask Technology 2016) >
November 17, 2016
Proc SPIE. 9985, Photomask Technology 2016, 99851S (November 17, 2016);  doi:10.1117/12.2242406

Proceedings Volume 10150 (Second International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2016)) >
November 11, 2016
Proc SPIE. 10150, Second International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2016), 101501E (November 11, 2016);  doi:10.1117/12.2248497

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