Lithography & Microelectronics

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 944002 (December 18, 2014);  doi:10.1117/12.2181010

Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 94400G (December 18, 2014);  doi:10.1117/12.2179347

Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 94400P (December 18, 2014);  doi:10.1117/12.2181137

Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 94400W (December 18, 2014);  doi:10.1117/12.2179558

Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 94400X (December 18, 2014);  doi:10.1117/12.2180809

Proceedings Volume 9295 (International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies) >
December 18, 2014
Proc SPIE. 9295, International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, 929513 (December 18, 2014);  doi:10.1117/12.2071554

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
December 18, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043019 (December 18, 2014);  doi:10.1117/1.JMM.13.4.043019

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
December 18, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043020 (December 18, 2014);  doi:10.1117/1.JMM.13.4.043020

Proceedings Volume 9293 (International Optical Design Conference 2014) >
December 17, 2014
Proc SPIE. 9293, International Optical Design Conference 2014, 92930A (December 17, 2014);  doi:10.1117/12.2072321

Proceedings Volume 9293 (International Optical Design Conference 2014) >
December 17, 2014
Proc SPIE. 9293, International Optical Design Conference 2014, 92931G (December 17, 2014);  doi:10.1117/12.2074914

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