Lithography & Microelectronics

PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
January 29, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 013504 (January 29, 2015);  doi:10.1117/1.JMM.14.1.013504

Optical Engineering  |  Materials, Photonic Devices, and Sensors
January 29, 2015
Opt. Eng. 54 (1), 017105 (January 29, 2015);  doi:10.1117/1.OE.54.1.017105

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
January 23, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 013503 (January 23, 2015);  doi:10.1117/1.JMM.14.1.013503

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
January 22, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 013502 (January 22, 2015);  doi:10.1117/1.JMM.14.1.013502

Open Access Open Access


Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microfabrication
January 20, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 014501 (January 20, 2015);  doi:10.1117/1.JMM.14.1.014501

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Micro-optoelectromechanical Systems (MOEMS)
January 20, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 015501 (January 20, 2015);  doi:10.1117/1.JMM.14.1.015501

Optical Engineering  |  Lasers, Fiber Optics, and Communications
January 12, 2015
Opt. Eng. 54 (1), 016105 (January 12, 2015);  doi:10.1117/1.OE.54.1.016105

Proceedings Volume 9444 (International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)) >
January 09, 2015
Proc SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014), 944403 (January 9, 2015);  doi:10.1117/12.2176532

Proceedings Volume 9444 (International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)) >
January 09, 2015
Proc SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014), 94440R (January 9, 2015);  doi:10.1117/12.2081112

Proceedings Volume 9444 (International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)) >
January 09, 2015
Proc SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014), 944415 (January 9, 2015);  doi:10.1117/12.2075143

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