Optical Lithography

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 94400X (December 18, 2014);  doi:10.1117/12.2180809

Proceedings Volume 9293 (International Optical Design Conference 2014) >
December 17, 2014
Proc SPIE. 9293, International Optical Design Conference 2014, 92931G (December 17, 2014);  doi:10.1117/12.2074914

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
December 17, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043018 (December 17, 2014);  doi:10.1117/1.JMM.13.4.043018

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
December 16, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043016 (December 16, 2014);  doi:10.1117/1.JMM.13.4.043016

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
December 11, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043015 (December 11, 2014);  doi:10.1117/1.JMM.13.4.043015

Open Access Open Access


Proceedings Volume 9261 (Ocean Remote Sensing and Monitoring from Space) >
December 10, 2014
Proc SPIE. 9261, Ocean Remote Sensing and Monitoring from Space, 92610A (December 10, 2014);  doi:10.1117/12.2069167

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Continuation of Scaling with Optical and Complementary Lithography
December 04, 2014
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 011004 (December 04, 2014);  doi:10.1117/1.JMM.14.1.011004

Open Access Open Access


Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
November 21, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043013 (November 21, 2014);  doi:10.1117/1.JMM.13.4.043013

Open Access Open Access


Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
November 20, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043012 (November 20, 2014);  doi:10.1117/1.JMM.13.4.043012

Proceedings Volume 9262 (Lidar Remote Sensing for Environmental Monitoring XIV) >
November 17, 2014
Proc SPIE. 9262, Lidar Remote Sensing for Environmental Monitoring XIV, 926218 (November 17, 2014);  doi:10.1117/12.2070297

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