Optical Lithography

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9530 (Automated Visual Inspection and Machine Vision) >
June 22, 2015
Proc SPIE. 9530, Automated Visual Inspection and Machine Vision, 953003 (June 22, 2015);  doi:10.1117/12.2184473

Proceedings Volume 9480 (Fiber Optic Sensors and Applications XII) >
June 03, 2015
Proc SPIE. 9480, Fiber Optic Sensors and Applications XII, 948010 (June 3, 2015);  doi:10.1117/12.2183328

Proceedings Volume 9518 (Bio-MEMS and Medical Microdevices II) >
June 01, 2015
Proc SPIE. 9518, Bio-MEMS and Medical Microdevices II, 951808 (June 1, 2015);  doi:10.1117/12.2180743

Proceedings Volume 9518 (Bio-MEMS and Medical Microdevices II) >
June 01, 2015
Proc SPIE. 9518, Bio-MEMS and Medical Microdevices II, 95180D (June 1, 2015);  doi:10.1117/12.2179562

Proceedings Volume 9518 (Bio-MEMS and Medical Microdevices II) >
June 01, 2015
Proc SPIE. 9518, Bio-MEMS and Medical Microdevices II, 95180O (June 1, 2015);  doi:10.1117/12.2179007

Proceedings Volume 9518 (Bio-MEMS and Medical Microdevices II) >
June 01, 2015
Proc SPIE. 9518, Bio-MEMS and Medical Microdevices II, 95180R (June 1, 2015);  doi:10.1117/12.2180361

Proceedings Volume 9518 (Bio-MEMS and Medical Microdevices II) >
June 01, 2015
Proc SPIE. 9518, Bio-MEMS and Medical Microdevices II, 951814 (June 1, 2015);  doi:10.1117/12.2180691

Proceedings Volume 9453 (Window and Dome Technologies and Materials XIV) >
May 28, 2015
Proc SPIE. 9453, Window and Dome Technologies and Materials XIV, 945309 (May 28, 2015);  doi:10.1117/12.2177631

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
May 22, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (2), 023507 (May 22, 2015);  doi:10.1117/1.JMM.14.2.023507

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Proceedings Volume 9517 (Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems) >
May 21, 2015
Proc SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951723 (May 21, 2015);  doi:10.1117/12.2179866

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