Optical Lithography

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9453 (Window and Dome Technologies and Materials XIV) >
May 28, 2015
Proc SPIE. 9453, Window and Dome Technologies and Materials XIV, 945309 (May 28, 2015);  doi:10.1117/12.2177631

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
May 22, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (2), 023507 (May 22, 2015);  doi:10.1117/1.JMM.14.2.023507

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Proceedings Volume 9517 (Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems) >
May 21, 2015
Proc SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951723 (May 21, 2015);  doi:10.1117/12.2179866

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
May 15, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (2), 023505 (May 15, 2015);  doi:10.1117/1.JMM.14.2.023505

Proceedings Volume 9486 (Advanced Environmental, Chemical, and Biological Sensing Technologies XII) >
May 13, 2015
Proc SPIE. 9486, Advanced Environmental, Chemical, and Biological Sensing Technologies XII, 948613 (May 13, 2015);  doi:10.1117/12.2183336

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Control of Integrated Circuit Patterning Variance Part 1: Metrology, Process Monitoring, and Control of Critical Dimension
May 13, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (2), 021106 (May 13, 2015);  doi:10.1117/1.JMM.14.2.021106

Proceedings Volume 9512 (Advances in X-ray Free-Electron Lasers Instrumentation III) >
May 12, 2015
Proc SPIE. 9512, Advances in X-ray Free-Electron Lasers Instrumentation III, 95121O (May 12, 2015);  doi:10.1117/12.2182239

Proceedings Volume 9512 (Advances in X-ray Free-Electron Lasers Instrumentation III) >
May 12, 2015
Proc SPIE. 9512, Advances in X-ray Free-Electron Lasers Instrumentation III, 95121W (May 12, 2015);  doi:10.1117/12.2185192

Proceedings Volume 9509 (Relativistic Plasma Waves and Particle Beams as Coherent and Incoherent Radiation Sources) >
May 12, 2015
Proc SPIE. 9509, Relativistic Plasma Waves and Particle Beams as Coherent and Incoherent Radiation Sources, 95090Q (May 12, 2015);  doi:10.1117/12.2182482

Proceedings Volume 9510 (EUV and X-ray Optics: Synergy between Laboratory and Space IV) >
May 12, 2015
Proc SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 95100T (May 12, 2015);  doi:10.1117/12.2181820

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