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PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microfabrication
March 05, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 014504 (March 05, 2015);  doi:10.1117/1.JMM.14.1.014504

Proceedings Volume 9365 (Integrated Optics: Devices, Materials, and Technologies XIX) >
February 27, 2015
Proc SPIE. 9365, Integrated Optics: Devices, Materials, and Technologies XIX, 93650Z (February 27, 2015);  doi:10.1117/12.2074608

Proceedings Volume 9258 (Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII) >
February 21, 2015
Proc SPIE. 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 92581S (February 21, 2015);  doi:10.1117/12.2072178

Proceedings Volume 9449 (The International Conference on Photonics and Optical Engineering (icPOE 2014)) >
February 19, 2015
Proc SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493R (February 19, 2015);  doi:10.1117/12.2083180

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
January 29, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 013504 (January 29, 2015);  doi:10.1117/1.JMM.14.1.013504

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microfabrication
January 20, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 014501 (January 20, 2015);  doi:10.1117/1.JMM.14.1.014501

Proceedings Volume 9444 (International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)) >
January 09, 2015
Proc SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014), 944417 (January 9, 2015);  doi:10.1117/12.2075175

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Continuation of Scaling with Optical and Complementary Lithography
December 22, 2014
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 011006 (December 22, 2014);  doi:10.1117/1.JMM.14.1.011006

Open Access Open Access


Proceedings Volume 9441 (19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics) >
December 05, 2014
Proc SPIE. 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 944118 (December 5, 2014);  doi:10.1117/12.2175903

Proceedings Volume 9441 (19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics) >
December 05, 2014
Proc SPIE. 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 944119 (December 5, 2014);  doi:10.1117/12.2175902

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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