Photoresists

PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microfabrication
January 20, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 014501 (January 20, 2015);  doi:10.1117/1.JMM.14.1.014501

Proceedings Volume 9444 (International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)) >
January 09, 2015
Proc SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014), 944417 (January 9, 2015);  doi:10.1117/12.2075175

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Continuation of Scaling with Optical and Complementary Lithography
December 22, 2014
J. Micro/Nanolith. MEMS MOEMS. 14 (1), 011006 (December 22, 2014);  doi:10.1117/1.JMM.14.1.011006

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Proceedings Volume 9441 (19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics) >
December 05, 2014
Proc SPIE. 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 944118 (December 5, 2014);  doi:10.1117/12.2175903

Proceedings Volume 9441 (19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics) >
December 05, 2014
Proc SPIE. 9441, 19th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 944119 (December 5, 2014);  doi:10.1117/12.2175902

Proceedings Volume 9300 (International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications) >
November 20, 2014
Proc SPIE. 9300, International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications, 93000T (November 20, 2014);  doi:10.1117/12.2071045

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
November 20, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043012 (November 20, 2014);  doi:10.1117/1.JMM.13.4.043012

Proceedings Volume 9231 (30th European Mask and Lithography Conference) >
October 17, 2014
Proc SPIE. 9231, 30th European Mask and Lithography Conference, 92310U (October 17, 2014);  doi:10.1117/12.2069941

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
October 16, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043002 (October 16, 2014);  doi:10.1117/1.JMM.13.4.043002

Proceedings Volume 9241 (Sensors, Systems, and Next-Generation Satellites XVIII) >
October 07, 2014
Proc SPIE. 9241, Sensors, Systems, and Next-Generation Satellites XVIII, 92411K (October 7, 2014);  doi:10.1117/12.2069596

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RELATED TOPIC COLLECTIONS

BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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