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PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9374 (Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII) >
April 17, 2015
Proc SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 937418 (April 17, 2015);  doi:10.1117/12.2075013

Proceedings Volume 9424 (Metrology, Inspection, and Process Control for Microlithography XXIX) >
April 10, 2015
Proc SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94242R (April 10, 2015);  doi:10.1117/12.2190984

Proceedings Volume 9422 (Extreme Ultraviolet (EUV) Lithography VI) >
April 06, 2015
Proc SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI, 942204 (April 6, 2015);  doi:10.1117/12.2085936

Proceedings Volume 9422 (Extreme Ultraviolet (EUV) Lithography VI) >
April 06, 2015
Proc SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI, 94220P (April 6, 2015);  doi:10.1117/12.2085927

Proceedings Volume 9422 (Extreme Ultraviolet (EUV) Lithography VI) >
April 06, 2015
Proc SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI, 94221D (April 6, 2015);  doi:10.1117/12.2085958

Proceedings Volume 9425 (Advances in Patterning Materials and Processes XXXII) >
April 03, 2015
Proc SPIE. 9425, Advances in Patterning Materials and Processes XXXII, 94250S (April 3, 2015);  doi:10.1117/12.2086006

Proceedings Volume 9425 (Advances in Patterning Materials and Processes XXXII) >
April 03, 2015
Proc SPIE. 9425, Advances in Patterning Materials and Processes XXXII, 94251A (April 3, 2015);  doi:10.1117/12.2085982

Proceedings Volume 9425 (Advances in Patterning Materials and Processes XXXII) >
April 02, 2015
Proc SPIE. 9425, Advances in Patterning Materials and Processes XXXII, 942526 (April 2, 2015);  doi:10.1117/12.2086982

Proceedings Volume 9365 (Integrated Optics: Devices, Materials, and Technologies XIX) >
April 02, 2015
Proc SPIE. 9365, Integrated Optics: Devices, Materials, and Technologies XIX, 936515 (April 2, 2015);  doi:10.1117/12.2076983

Proceedings Volume 9425 (Advances in Patterning Materials and Processes XXXII) >
April 01, 2015
Proc SPIE. 9425, Advances in Patterning Materials and Processes XXXII, 942516 (April 1, 2015);  doi:10.1117/12.2086486

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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