Photoresists

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9282 (7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment) >
September 18, 2014
Proc SPIE. 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928208 (September 18, 2014);  doi:10.1117/12.2067887

Proceedings Volume 9235 (Photomask Technology 2014) >
September 16, 2014
Proc SPIE. 9235, Photomask Technology 2014, 92350Y (September 16, 2014);  doi:10.1117/12.2065930

Proceedings Volume 9187 (The Nature of Light: Light in Nature V) >
September 08, 2014
Proc SPIE. 9187, The Nature of Light: Light in Nature V, 91870E (September 8, 2014);  doi:10.1117/12.2066467

Proceedings Volume 9207 (Advances in X-Ray/EUV Optics and Components IX) >
September 05, 2014
Proc SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX, 920706 (September 5, 2014);  doi:10.1117/12.2062340

Proceedings Volume 9201 (Optical Data Storage 2014) >
September 05, 2014
Proc SPIE. 9201, Optical Data Storage 2014, 92010U (September 5, 2014);  doi:10.1117/12.2060828

Optical Engineering  |  Materials, Photonic Devices, and Sensors
September 02, 2014
Opt. Eng. 53 (9), 097101 (September 02, 2014);  doi:10.1117/1.OE.53.9.097101

Proceedings Volume 9170 (Nanoengineering: Fabrication, Properties, Optics, and Devices XI) >
August 28, 2014
Proc SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 91701I (August 28, 2014);  doi:10.1117/12.2061191

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 27, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033010 (August 27, 2014);  doi:10.1117/1.JMM.13.3.033010

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 11, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033008 (August 11, 2014);  doi:10.1117/1.JMM.13.3.033008

Optical Engineering  |  Instrumentation, Techniques, and Measurement
August 06, 2014
Opt. Eng. 53 (8), 084104 (August 06, 2014);  doi:10.1117/1.OE.53.8.084104

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Field Guide to Optical Lithography
Field Guide to Optical Lithography
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