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PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9524 (International Conference on Optical and Photonic Engineering (icOPEN 2015)) >
July 17, 2015
Proc SPIE. 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95242T (July 17, 2015);  doi:10.1117/12.2190644

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
July 15, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (3), 033504 (July 15, 2015);  doi:10.1117/1.JMM.14.3.033504

Proceedings Volume 9658 (Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII) >
July 09, 2015
Proc SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 96580E (July 9, 2015);  doi:10.1117/12.2201048

Proceedings Volume 9658 (Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII) >
July 09, 2015
Proc SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 96580T (July 9, 2015);  doi:10.1117/12.2192930

Proceedings Volume 9658 (Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII) >
July 09, 2015
Proc SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 96581C (July 9, 2015);  doi:10.1117/12.2193060

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Metrology
July 09, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (3), 034001 (July 09, 2015);  doi:10.1117/1.JMM.14.3.034001

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Journal of Nanophotonics  |  Research Papers
July 02, 2015
J. Nanophoton. 9 (1), 093067 (July 02, 2015);  doi:10.1117/1.JNP.9.093067

Proceedings Volume 9530 (Automated Visual Inspection and Machine Vision) >
June 22, 2015
Proc SPIE. 9530, Automated Visual Inspection and Machine Vision, 953003 (June 22, 2015);  doi:10.1117/12.2184473

Proceedings Volume 9525 (Optical Measurement Systems for Industrial Inspection IX) >
June 22, 2015
Proc SPIE. 9525, Optical Measurement Systems for Industrial Inspection IX, 95251V (June 22, 2015);  doi:10.1117/12.2184683

Proceedings Volume 9526 (Modeling Aspects in Optical Metrology V) >
June 21, 2015
Proc SPIE. 9526, Modeling Aspects in Optical Metrology V, 952606 (June 21, 2015);  doi:10.1117/12.2184555

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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