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PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 27, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033010 (August 27, 2014);  doi:10.1117/1.JMM.13.3.033010

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
August 11, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033008 (August 11, 2014);  doi:10.1117/1.JMM.13.3.033008

Optical Engineering  |  Instrumentation, Techniques, and Measurement
August 06, 2014
Opt. Eng. 53 (8), 084104 (August 06, 2014);  doi:10.1117/1.OE.53.8.084104

Optical Engineering  |  Instrumentation, Techniques, and Measurement
August 05, 2014
Opt. Eng. 53 (8), 084101 (August 05, 2014);  doi:10.1117/1.OE.53.8.084101

Open Access Open Access


Proceedings Volume 9151 (Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation) >
July 28, 2014
Proc SPIE. 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91511G (July 28, 2014);  doi:10.1117/12.2057468

Proceedings Volume 9151 (Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation) >
July 28, 2014
Proc SPIE. 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91511I (July 28, 2014);  doi:10.1117/12.2055328

Proceedings Volume 9256 (Photomask and Next-Generation Lithography Mask Technology XXI) >
July 28, 2014
Proc SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI, 925608 (July 28, 2014);  doi:10.1117/12.2069651

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
July 22, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033004 (July 22, 2014);  doi:10.1117/1.JMM.13.3.033004

Journal of Photonics for Energy  |  Breakthroughs in Photonics and Energy
June 27, 2014
J. Photon. Energy. 4 (1), 040996 (June 27, 2014);  doi:10.1117/1.JPE.4.040996

Open Access Open Access


Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
June 27, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (2), 023013 (June 27, 2014);  doi:10.1117/1.JMM.13.2.023013

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Field Guide to Optical Lithography
Field Guide to Optical Lithography
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