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PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
July 22, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (3), 033004 (July 22, 2014);  doi:10.1117/1.JMM.13.3.033004

Journal of Photonics for Energy  |  Breakthroughs in Photonics and Energy
June 27, 2014
J. Photon. Energy. 4 (1), 040996 (June 27, 2014);  doi:10.1117/1.JPE.4.040996

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Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
June 27, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (2), 023013 (June 27, 2014);  doi:10.1117/1.JMM.13.2.023013

Proceedings Volume 9116 (Next-Generation Robots and Systems) >
June 04, 2014
Proc SPIE. 9116, Next-Generation Robots and Systems, 91160F (June 4, 2014);  doi:10.1117/12.2053429

Proceedings Volume 9234 (International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics) >
June 02, 2014
Proc SPIE. 9234, International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics, 92341B (June 2, 2014);  doi:10.1117/12.2054296

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
May 19, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (2), 023006 (May 19, 2014);  doi:10.1117/1.JMM.13.2.023006

Proceedings Volume 9130 (Micro-Optics 2014) >
May 02, 2014
Proc SPIE. 9130, Micro-Optics 2014, 91300R (May 2, 2014);  doi:10.1117/12.2052451

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 24, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90481S (April 24, 2014);  doi:10.1117/12.2046790

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90481A (April 17, 2014);  doi:10.1117/12.2046613

Proceedings Volume 9048 (Extreme Ultraviolet (EUV) Lithography V) >
April 17, 2014
Proc SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V, 90481B (April 17, 2014);  doi:10.1117/12.2047380

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Field Guide to Optical Lithography
Field Guide to Optical Lithography
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