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PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Alternative Lithographic Technologies V
August 17, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (3), 031602 (August 17, 2016);  doi:10.1117/1.JMM.15.3.031602

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Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microfabrication
August 09, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (3), 034503 (August 09, 2016);  doi:10.1117/1.JMM.15.3.034503

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
August 08, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (3), 033506 (August 08, 2016);  doi:10.1117/1.JMM.15.3.033506

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
August 01, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (3), 033505 (August 01, 2016);  doi:10.1117/1.JMM.15.3.033505

Proceedings Volume 9912 (Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II) >
July 22, 2016
Proc SPIE. 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II, 99123Z (July 22, 2016);  doi:10.1117/12.2233388

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
July 15, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (3), 033502 (July 15, 2016);  doi:10.1117/1.JMM.15.3.033502

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Microfabrication
June 09, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (2), 024501 (June 09, 2016);  doi:10.1117/1.JMM.15.2.024501

Proceedings Volume 9864 (Sensing for Agriculture and Food Quality and Safety VIII) >
May 17, 2016
Proc SPIE. 9864, Sensing for Agriculture and Food Quality and Safety VIII, 986405 (May 17, 2016);  doi:10.1117/12.2225571

Proceedings Volume 9888 (Micro-Optics 2016) >
April 27, 2016
Proc SPIE. 9888, Micro-Optics 2016, 988805 (April 27, 2016);  doi:10.1117/12.2225917

Proceedings Volume 9721 (Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XIII) >
April 22, 2016
Proc SPIE. 9721, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XIII, 97210U (April 22, 2016);  doi:10.1117/12.2212028

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RELATED TOPIC COLLECTIONS

BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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