Lithographic Metrology

PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Lithography
February 16, 2017
J. Micro/Nanolith. MEMS MOEMS. 16 (1), 013503 (February 16, 2017);  doi:10.1117/1.JMM.16.1.013503

Journal of Applied Remote Sensing  |  Remote Sensing Applications and Decision Support
February 07, 2017
J. Appl. Remote Sens. 11 (1), 016024 (February 07, 2017);  doi:10.1117/1.JRS.11.016024

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  JM3 Letters
January 05, 2017
J. Micro/Nanolith. MEMS MOEMS. 16 (1), 010501 (January 05, 2017);  doi:10.1117/1.JMM.16.1.010501

Proceedings Volume 9920 (Active Photonic Materials VIII) >
November 09, 2016
Proc SPIE. 9920, Active Photonic Materials VIII, 99200Y (November 9, 2016);  doi:10.1117/12.2236493

Proceedings Volume 10027 (Nanophotonics and Micro/Nano Optics III) >
October 31, 2016
Proc SPIE. 10027, Nanophotonics and Micro/Nano Optics III, 1002706 (October 31, 2016);  doi:10.1117/12.2245513

Proceedings Volume 9985 (Photomask Technology 2016) >
October 25, 2016
Proc SPIE. 9985, Photomask Technology 2016, 99850K (October 25, 2016);  doi:10.1117/12.2246945

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Metrology
October 25, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (4), 044004 (October 25, 2016);  doi:10.1117/1.JMM.15.4.044004

Proceedings Volume 9985 (Photomask Technology 2016) >
October 25, 2016
Proc SPIE. 9985, Photomask Technology 2016, 99851T (October 25, 2016);  doi:10.1117/12.2242809

Journal of Biomedical Optics  |  Research Papers: Sensing
October 24, 2016
J. Biomed. Opt. 21 (10), 107004 (October 24, 2016);  doi:10.1117/1.JBO.21.10.107004

Proceedings Volume 10032 (32nd European Mask and Lithography Conference) >
October 20, 2016
Proc SPIE. 10032, 32nd European Mask and Lithography Conference, 1003202 (October 20, 2016);  doi:10.1117/12.2248013

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RELATED TOPIC COLLECTIONS

BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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