Lithographic Metrology

PROCEEDINGS & JOURNAL ARTICLES

Optical Engineering  |  Imaging Components, Systems, and Processing
May 22, 2017
Opt. Eng. 56 (5), 053109 (May 22, 2017);  doi:10.1117/1.OE.56.5.053109

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Metrology
May 17, 2017
J. Micro/Nanolith. MEMS MOEMS. 16 (2), 024002 (May 17, 2017);  doi:10.1117/1.JMM.16.2.024002

Open Access Open Access


Proceedings Volume 10149 (Advanced Etch Technology for Nanopatterning VI) >
May 09, 2017
Proc SPIE. 10149, Advanced Etch Technology for Nanopatterning VI, 101490W (May 9, 2017);  doi:10.1117/12.2258097

Proceedings Volume 10143 (Extreme Ultraviolet (EUV) Lithography VIII) >
May 05, 2017
Proc SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII, 101430X (May 5, 2017);  doi:10.1117/12.2258164

Proceedings Volume 10145 (Metrology, Inspection, and Process Control for Microlithography XXXI) >
April 28, 2017
Proc SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101451Q (April 28, 2017);  doi:10.1117/12.2260443

Proceedings Volume 10145 (Metrology, Inspection, and Process Control for Microlithography XXXI) >
April 28, 2017
Proc SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101451W (April 28, 2017);  doi:10.1117/12.2257690

Proceedings Volume 10144 (Emerging Patterning Technologies) >
April 27, 2017
Proc SPIE. 10144, Emerging Patterning Technologies, 101440N (April 27, 2017);  doi:10.1117/12.2260878

Proceedings Volume 10149 (Advanced Etch Technology for Nanopatterning VI) >
April 27, 2017
Proc SPIE. 10149, Advanced Etch Technology for Nanopatterning VI, 101490C (April 27, 2017);  doi:10.1117/12.2261801

Proceedings Volume 10149 (Advanced Etch Technology for Nanopatterning VI) >
April 27, 2017
Proc SPIE. 10149, Advanced Etch Technology for Nanopatterning VI, 101490P (April 27, 2017);  doi:10.1117/12.2257507

Proceedings Volume 10147 (Optical Microlithography XXX) >
April 26, 2017
Proc SPIE. 10147, Optical Microlithography XXX, 101470V (April 26, 2017);  doi:10.1117/12.2258060

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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