Metrology

PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Control of Integrated Circuit Patterning Variance Part 1: Metrology, Process Monitoring, and Control of Critical Dimension
June 26, 2015
J. Micro/Nanolith. MEMS MOEMS. 14 (2), 021101 (June 26, 2015);  doi:10.1117/1.JMM.14.2.021101

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Optical Engineering  |  Instrumentation, Techniques, and Measurement
June 23, 2015
Opt. Eng. 54 (6), 064103 (June 23, 2015);  doi:10.1117/1.OE.54.6.064103

Proceedings Volume 9530 (Automated Visual Inspection and Machine Vision) >
June 22, 2015
Proc SPIE. 9530, Automated Visual Inspection and Machine Vision, 953006 (June 22, 2015);  doi:10.1117/12.2184614

Proceedings Volume 9530 (Automated Visual Inspection and Machine Vision) >
June 22, 2015
Proc SPIE. 9530, Automated Visual Inspection and Machine Vision, 95300C (June 22, 2015);  doi:10.1117/12.2183081

Proceedings Volume 9529 (Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II) >
June 22, 2015
Proc SPIE. 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 952903 (June 22, 2015);  doi:10.1117/12.2184471

Proceedings Volume 9529 (Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II) >
June 22, 2015
Proc SPIE. 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 952909 (June 22, 2015);  doi:10.1117/12.2186771

Proceedings Volume 9529 (Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II) >
June 22, 2015
Proc SPIE. 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 95290G (June 22, 2015);  doi:10.1117/12.2184900

Proceedings Volume 9529 (Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II) >
June 22, 2015
Proc SPIE. 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 95290W (June 22, 2015);  doi:10.1117/12.2184850

Proceedings Volume 9529 (Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II) >
June 22, 2015
Proc SPIE. 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 95290X (June 22, 2015);  doi:10.1117/12.2184795

Proceedings Volume 9529 (Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II) >
June 22, 2015
Proc SPIE. 9529, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials II, 95290Y (June 22, 2015);  doi:10.1117/12.2184567

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