Metrology

PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Holistic/Hybrid Metrology
December 19, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 041414 (December 19, 2014);  doi:10.1117/1.JMM.13.4.041414

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Holistic/Hybrid Metrology
December 19, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 041401 (December 19, 2014);  doi:10.1117/1.JMM.13.4.041401

Open Access Open Access


Proceedings Volume 9440 (International Conference on Micro- and Nano-Electronics 2014) >
December 18, 2014
Proc SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014, 94400S (December 18, 2014);  doi:10.1117/12.2180637

Proceedings Volume 9261 (Ocean Remote Sensing and Monitoring from Space) >
December 18, 2014
Proc SPIE. 9261, Ocean Remote Sensing and Monitoring from Space, 92610Q (December 18, 2014);  doi:10.1117/12.2068987

Journal of Applied Remote Sensing  |  Research Papers
December 18, 2014
J. Appl. Remote Sens. 8 (1), 083504 (December 18, 2014);  doi:10.1117/1.JRS.8.083504

Optical Engineering  |  Instrumentation, Techniques, and Measurement
December 18, 2014
Opt. Eng. 53 (12), 124103 (December 18, 2014);  doi:10.1117/1.OE.53.12.124103

Proceedings Volume 9293 (International Optical Design Conference 2014) >
December 17, 2014
Proc SPIE. 9293, International Optical Design Conference 2014, 929328 (December 17, 2014);  doi:10.1117/12.2075363

Journal of Biomedical Optics  |  Research Papers: Sensing
December 17, 2014
J. Biomed. Opt. 19 (12), 127005 (December 17, 2014);  doi:10.1117/1.JBO.19.12.127005

Proceedings Volume 9274 (Advanced Sensor Systems and Applications VI) >
December 12, 2014
Proc SPIE. 9274, Advanced Sensor Systems and Applications VI, 92741C (December 12, 2014);  doi:10.1117/12.2071509

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Regular Articles
December 11, 2014
J. Micro/Nanolith. MEMS MOEMS. 13 (4), 043015 (December 11, 2014);  doi:10.1117/1.JMM.13.4.043015

Open Access Open Access


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