Metrology

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9803 (Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2016) >
June 22, 2016
Proc SPIE. 9803, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2016, 98032W (June 22, 2016);  doi:10.1117/12.2218592

Optical Engineering  |  Special Section on Speckle-Based Metrology
June 22, 2016
Opt. Eng. 55 (12), 121707 (June 22, 2016);  doi:10.1117/1.OE.55.12.121707

Proceedings Volume 9776 (Extreme Ultraviolet (EUV) Lithography VII) >
June 20, 2016
Proc SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII, 977627 (June 20, 2016);  doi:10.1117/12.2218902

Proceedings Volume 10015 (Poster Previews: SPIE Astronomical Telescopes and Instrumentation 2016) >
June 16, 2016
Proc SPIE. 10015, Poster Previews: SPIE Astronomical Telescopes and Instrumentation 2016, 1001505 (June 16, 2016);  doi:10.1117/12.2248393

Optical Engineering  |  Instrumentation, Techniques, and Measurement
June 16, 2016
Opt. Eng. 55 (6), 064108 (June 16, 2016);  doi:10.1117/1.OE.55.6.064108

Optical Engineering  |  Materials, Photonic Devices, and Sensors
June 10, 2016
Opt. Eng. 55 (6), 067104 (June 10, 2016);  doi:10.1117/1.OE.55.6.067104

Proceedings Volume 9900 (Quantum Optics) >
June 09, 2016
Proc SPIE. 9900, Quantum Optics, 990009 (June 9, 2016);  doi:10.1117/12.2232143

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Control of Integrated Circuit Patterning Variance, Part 2: Image Placement, Device Overlay, and Critical Dimension
June 09, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (2), 021410 (June 09, 2016);  doi:10.1117/1.JMM.15.2.021410

Proceedings Volume 9866 (Autonomous Air and Ground Sensing Systems for Agricultural Optimization and Phenotyping) >
June 08, 2016
Proc SPIE. 9866, Autonomous Air and Ground Sensing Systems for Agricultural Optimization and Phenotyping, 986604 (June 8, 2016);  doi:10.1117/12.2229389

Proceedings Volume 9867 (Three-Dimensional Imaging, Visualization, and Display 2016) >
June 01, 2016
Proc SPIE. 9867, Three-Dimensional Imaging, Visualization, and Display 2016, 98670K (June 1, 2016);  doi:10.1117/12.2229727

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