Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Optical Engineering  |  Imaging Components, Systems, and Processing
April 15, 2015
Opt. Eng. 54 (4), 043105 (April 15, 2015);  doi:10.1117/1.OE.54.4.043105

Proceedings Volume 9424 (Metrology, Inspection, and Process Control for Microlithography XXIX) >
April 10, 2015
Proc SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94242P (April 10, 2015);  doi:10.1117/12.2185543

Journal of Applied Remote Sensing  |  Remote Sensing Applications and Decision Support
April 07, 2015
J. Appl. Remote Sens. 9 (1), 096065 (April 07, 2015);  doi:10.1117/1.JRS.9.096065

Proceedings Volume 9367 (Silicon Photonics X) >
April 03, 2015
Proc SPIE. 9367, Silicon Photonics X, 93670M (April 3, 2015);  doi:10.1117/12.2084604

Proceedings Volume 9431 (Active and Passive Smart Structures and Integrated Systems 2015) >
April 02, 2015
Proc SPIE. 9431, Active and Passive Smart Structures and Integrated Systems 2015, 943115 (April 2, 2015);  doi:10.1117/12.2084106

Proceedings Volume 9432 (Behavior and Mechanics of Multifunctional Materials and Composites 2015) >
April 01, 2015
Proc SPIE. 9432, Behavior and Mechanics of Multifunctional Materials and Composites 2015, 943207 (April 1, 2015);  doi:10.1117/12.2084393

Proceedings Volume 9437 (Structural Health Monitoring and Inspection of Advanced Materials, Aerospace, and Civil Infrastructure 2015) >
April 01, 2015
Proc SPIE. 9437, Structural Health Monitoring and Inspection of Advanced Materials, Aerospace, and Civil Infrastructure 2015, 94370U (April 1, 2015);  doi:10.1117/12.2084101

Proceedings Volume 9436 (Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015) >
March 27, 2015
Proc SPIE. 9436, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015, 943606 (March 27, 2015);  doi:10.1117/12.2084189

Proceedings Volume 9436 (Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015) >
March 27, 2015
Proc SPIE. 9436, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015, 943609 (March 27, 2015);  doi:10.1117/12.2087600

Proceedings Volume 9435 (Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015) >
March 27, 2015
Proc SPIE. 9435, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015, 943519 (March 27, 2015);  doi:10.1117/12.2175830

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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