Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Journal of Astronomical Telescopes, Instruments, and Systems  |  Imaging, Spectroscopic, High-Contrast, and Interferometric Instrumentation
May 27, 2016
J. Astron. Telesc. Instrum. Syst. 2 (2), 025004 (May 27, 2016);  doi:10.1117/1.JATIS.2.2.025004

Proceedings Volume 9718 (Quantitative Phase Imaging II) >
May 26, 2016
Proc SPIE. 9718, Quantitative Phase Imaging II, 971811 (May 26, 2016);  doi:10.1117/12.2214895

Proceedings Volume 9870 (Computational Imaging) >
May 20, 2016
Proc SPIE. 9870, Computational Imaging, 98700A (May 20, 2016);  doi:10.1117/12.2229019

Proceedings Volume 9870 (Computational Imaging) >
May 20, 2016
Proc SPIE. 9870, Computational Imaging, 98700B (May 20, 2016);  doi:10.1117/12.2224316

Proceedings Volume 9870 (Computational Imaging) >
May 20, 2016
Proc SPIE. 9870, Computational Imaging, 98700C (May 20, 2016);  doi:10.1117/12.2222157

Proceedings Volume 9868 (Dimensional Optical Metrology and Inspection for Practical Applications V) >
May 19, 2016
Proc SPIE. 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 98680H (May 19, 2016);  doi:10.1117/12.2220261

Proceedings Volume 9846 (Long-Range Imaging) >
May 18, 2016
Proc SPIE. 9846, Long-Range Imaging, 98460D (May 18, 2016);  doi:10.1117/12.2224122

Proceedings Volume 9846 (Long-Range Imaging) >
May 18, 2016
Proc SPIE. 9846, Long-Range Imaging, 98460E (May 18, 2016);  doi:10.1117/12.2224322

Proceedings Volume 9821 (Tri-Technology Device Refrigeration (TTDR)) >
May 18, 2016
Proc SPIE. 9821, Tri-Technology Device Refrigeration (TTDR), 98210O (May 18, 2016);  doi:10.1117/12.2224731

Proceedings Volume 9836 (Micro- and Nanotechnology Sensors, Systems, and Applications VIII) >
May 17, 2016
Proc SPIE. 9836, Micro- and Nanotechnology Sensors, Systems, and Applications VIII, 983603 (May 17, 2016);  doi:10.1117/12.2224750

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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