Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9200 (Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII) >
September 16, 2014
Proc SPIE. 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII, 92001M (September 16, 2014);  doi:10.1117/12.2066736

Proceedings Volume 9235 (Photomask Technology 2014) >
September 16, 2014
Proc SPIE. 9235, Photomask Technology 2014, 92351C (September 16, 2014);  doi:10.1117/12.2066134

Proceedings Volume 9235 (Photomask Technology 2014) >
September 16, 2014
Proc SPIE. 9235, Photomask Technology 2014, 92351B (September 16, 2014);  doi:10.1117/12.2065655

Proceedings Volume 9235 (Photomask Technology 2014) >
September 16, 2014
Proc SPIE. 9235, Photomask Technology 2014, 92350M (September 16, 2014);  doi:10.1117/12.2069161

Proceedings Volume 9222 (Imaging Spectrometry XIX) >
September 15, 2014
Proc SPIE. 9222, Imaging Spectrometry XIX, 92220M (September 15, 2014);  doi:10.1117/12.2061420

Proceedings Volume 9163 (Plasmonics: Metallic Nanostructures and Their Optical Properties XII) >
September 10, 2014
Proc SPIE. 9163, Plasmonics: Metallic Nanostructures and Their Optical Properties XII, 91631W (September 10, 2014);  doi:10.1117/12.2063235

Proceedings Volume 9196 (Systems Contamination: Prediction, Measurement, and Control 2014) >
September 09, 2014
Proc SPIE. 9196, Systems Contamination: Prediction, Measurement, and Control 2014, 91960G (September 9, 2014);  doi:10.1117/12.2060872

Proceedings Volume 9280 (7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes) >
September 08, 2014
Proc SPIE. 9280, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 92800K (September 8, 2014);  doi:10.1117/12.2070195

Proceedings Volume 9200 (Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII) >
September 05, 2014
Proc SPIE. 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII, 920010 (September 5, 2014);  doi:10.1117/12.2072632

Proceedings Volume 9210 (X-Ray Free-Electron Lasers: Beam Diagnostics, Beamline Instrumentation, and Applications II) >
September 05, 2014
Proc SPIE. 9210, X-Ray Free-Electron Lasers: Beam Diagnostics, Beamline Instrumentation, and Applications II, 92100M (September 5, 2014);  doi:10.1117/12.2069362

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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