Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9436 (Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015) >
March 27, 2015
Proc SPIE. 9436, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015, 943606 (March 27, 2015);  doi:10.1117/12.2084189

Proceedings Volume 9436 (Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015) >
March 27, 2015
Proc SPIE. 9436, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2015, 943609 (March 27, 2015);  doi:10.1117/12.2087600

Proceedings Volume 9435 (Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015) >
March 27, 2015
Proc SPIE. 9435, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015, 943519 (March 27, 2015);  doi:10.1117/12.2175830

Optical Engineering  |  Materials, Photonic Devices, and Sensors
March 26, 2015
Opt. Eng. 54 (3), 037109 (March 26, 2015);  doi:10.1117/1.OE.54.3.037109

Proceedings Volume 9419 (Medical Imaging 2015: Ultrasonic Imaging and Tomography) >
March 24, 2015
Proc SPIE. 9419, Medical Imaging 2015: Ultrasonic Imaging and Tomography, 94190L (March 24, 2015);  doi:10.1117/12.2084602

Journal of Medical Imaging  |  Image Processing
March 24, 2015
J. Med. Imag. 2 (1), 014004 (March 24, 2015);  doi:10.1117/1.JMI.2.1.014004

Open Access Open Access


Proceedings Volume 9424 (Metrology, Inspection, and Process Control for Microlithography XXIX) >
March 19, 2015
Proc SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240T (March 19, 2015);  doi:10.1117/12.2085054

Proceedings Volume 9424 (Metrology, Inspection, and Process Control for Microlithography XXIX) >
March 19, 2015
Proc SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240Z (March 19, 2015);  doi:10.1117/12.2085795

Proceedings Volume 9424 (Metrology, Inspection, and Process Control for Microlithography XXIX) >
March 19, 2015
Proc SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 942416 (March 19, 2015);  doi:10.1117/12.2085683

Proceedings Volume 9424 (Metrology, Inspection, and Process Control for Microlithography XXIX) >
March 19, 2015
Proc SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94241F (March 19, 2015);  doi:10.1117/12.2085957

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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