Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9375 (MOEMS and Miniaturized Systems XIV) >
February 27, 2015
Proc SPIE. 9375, MOEMS and Miniaturized Systems XIV, 93750D (February 27, 2015);  doi:10.1117/12.2076921

Proceedings Volume 9375 (MOEMS and Miniaturized Systems XIV) >
February 27, 2015
Proc SPIE. 9375, MOEMS and Miniaturized Systems XIV, 937512 (February 27, 2015);  doi:10.1117/12.2080721

Proceedings Volume 9372 (High Contrast Metastructures IV) >
February 27, 2015
Proc SPIE. 9372, High Contrast Metastructures IV, 93720F (February 27, 2015);  doi:10.1117/12.2081446

Proceedings Volume 9303 (Photonic Therapeutics and Diagnostics XI) >
February 26, 2015
Proc SPIE. 9303, Photonic Therapeutics and Diagnostics XI, 930307 (February 26, 2015);  doi:10.1117/12.2077188

Optical Engineering  |  Instrumentation, Techniques, and Measurement
February 25, 2015
Opt. Eng. 54 (2), 024110 (February 25, 2015);  doi:10.1117/1.OE.54.2.024110

Proceedings Volume 9306 (Lasers in Dentistry XXI) >
February 24, 2015
Proc SPIE. 9306, Lasers in Dentistry XXI, 93060I (February 24, 2015);  doi:10.1117/12.2076008

Proceedings Volume 9449 (The International Conference on Photonics and Optical Engineering (icPOE 2014)) >
February 20, 2015
Proc SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 944909 (February 20, 2015);  doi:10.1117/12.2075504

Proceedings Volume 9449 (The International Conference on Photonics and Optical Engineering (icPOE 2014)) >
February 20, 2015
Proc SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94492T (February 20, 2015);  doi:10.1117/12.2075830

Proceedings Volume 9449 (The International Conference on Photonics and Optical Engineering (icPOE 2014)) >
February 20, 2015
Proc SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 944933 (February 20, 2015);  doi:10.1117/12.2081125

Proceedings Volume 9449 (The International Conference on Photonics and Optical Engineering (icPOE 2014)) >
February 20, 2015
Proc SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 944938 (February 20, 2015);  doi:10.1117/12.2081972

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Field Guide to Optical Lithography
Field Guide to Optical Lithography
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