Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 9776 (Extreme Ultraviolet (EUV) Lithography VII) >
June 20, 2016
Proc SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII, 977627 (June 20, 2016);  doi:10.1117/12.2218902

Proceedings Volume 10015 (Poster Previews: SPIE Astronomical Telescopes and Instrumentation 2016) >
June 16, 2016
Proc SPIE. 10015, Poster Previews: SPIE Astronomical Telescopes and Instrumentation 2016, 1001505 (June 16, 2016);  doi:10.1117/12.2248393

Proceedings Volume 9866 (Autonomous Air and Ground Sensing Systems for Agricultural Optimization and Phenotyping) >
June 08, 2016
Proc SPIE. 9866, Autonomous Air and Ground Sensing Systems for Agricultural Optimization and Phenotyping, 986604 (June 8, 2016);  doi:10.1117/12.2229389

Proceedings Volume 9867 (Three-Dimensional Imaging, Visualization, and Display 2016) >
June 01, 2016
Proc SPIE. 9867, Three-Dimensional Imaging, Visualization, and Display 2016, 98670K (June 1, 2016);  doi:10.1117/12.2229727

Proceedings Volume 9867 (Three-Dimensional Imaging, Visualization, and Display 2016) >
June 01, 2016
Proc SPIE. 9867, Three-Dimensional Imaging, Visualization, and Display 2016, 986714 (June 1, 2016);  doi:10.1117/12.2224758

Optical Engineering  |  Instrumentation, Techniques, and Measurement
June 01, 2016
Opt. Eng. 55 (6), 064101 (June 01, 2016);  doi:10.1117/1.OE.55.6.064101

Optical Engineering  |  Special Section on Speckle-Based Metrology
June 01, 2016
Opt. Eng. 55 (12), 121704 (June 01, 2016);  doi:10.1117/1.OE.55.12.121704

Optical Engineering  |  Instrumentation, Techniques, and Measurement
June 01, 2016
Opt. Eng. 55 (6), 064102 (June 01, 2016);  doi:10.1117/1.OE.55.6.064102

Open Access Open Access


Journal of Astronomical Telescopes, Instruments, and Systems  |  Imaging, Spectroscopic, High-Contrast, and Interferometric Instrumentation
May 27, 2016
J. Astron. Telesc. Instrum. Syst. 2 (2), 025004 (May 27, 2016);  doi:10.1117/1.JATIS.2.2.025004

Proceedings Volume 9718 (Quantitative Phase Imaging II) >
May 26, 2016
Proc SPIE. 9718, Quantitative Phase Imaging II, 971811 (May 26, 2016);  doi:10.1117/12.2214895

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Field Guide to Optical Lithography
Field Guide to Optical Lithography
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