Optical Metrology

PROCEEDINGS & JOURNAL ARTICLES

Journal of Micro/Nanolithography, MEMS, and MOEMS  |  Special Section on Photomask Manufacturing Technology
January 29, 2016
J. Micro/Nanolith. MEMS MOEMS. 15 (2), 021002 (January 29, 2016);  doi:10.1117/1.JMM.15.2.021002

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Proceedings Volume 9903 (Seventh International Symposium on Precision Mechanical Measurements) >
January 26, 2016
Proc SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements, 990306 (January 26, 2016);  doi:10.1117/12.2217703

Proceedings Volume 9903 (Seventh International Symposium on Precision Mechanical Measurements) >
January 26, 2016
Proc SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements, 99030B (January 26, 2016);  doi:10.1117/12.2216216

Proceedings Volume 9903 (Seventh International Symposium on Precision Mechanical Measurements) >
January 26, 2016
Proc SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements, 99030W (January 26, 2016);  doi:10.1117/12.2211353

Proceedings Volume 9903 (Seventh International Symposium on Precision Mechanical Measurements) >
January 26, 2016
Proc SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements, 990310 (January 26, 2016);  doi:10.1117/12.2211507

Proceedings Volume 9903 (Seventh International Symposium on Precision Mechanical Measurements) >
January 26, 2016
Proc SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements, 99031B (January 26, 2016);  doi:10.1117/12.2211894

Proceedings Volume 9903 (Seventh International Symposium on Precision Mechanical Measurements) >
January 26, 2016
Proc SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements, 99032Z (January 26, 2016);  doi:10.1117/12.2218423

Proceedings Volume 9796 (Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015) >
January 26, 2016
Proc SPIE. 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 97961I (January 26, 2016);  doi:10.1117/12.2228087

Journal of Applied Remote Sensing  |  Remote Sensing Applications and Decision Support
January 25, 2016
J. Appl. Remote Sens. 10 (1), 016006 (January 25, 2016);  doi:10.1117/1.JRS.10.016006

Journal of Astronomical Telescopes, Instruments, and Systems  |  Special Section on WFIRST-AFTA Coronagraphs
January 25, 2016
J. Astron. Telesc. Instrum. Syst. 2 (1), 011015 (January 25, 2016);  doi:10.1117/1.JATIS.2.1.011015

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BOOKS

Field Guide to Optical Lithography
Field Guide to Optical Lithography
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