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PROCEEDINGS & JOURNAL ARTICLES

Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Hybrid and transflective system based on digital holographic microscope and low coherent interferometer for high gradient shape measurement
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880A (May 13, 2013);  doi:10.1117/12.2020980
Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Non-contact profiling for high precision fast asphere topology measurement
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 878819 (May 13, 2013);  doi:10.1117/12.2020572
Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Sub-nanometer in-die overlay metrology: measurement and simulation at the edge of finiteness
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 87881N (May 13, 2013);  doi:10.1117/12.2020930
Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Nanometrology of periodic nanopillar arrays by means of light scattering
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 87881O (May 13, 2013);  doi:10.1117/12.2020880
Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Development of program package for investigation and modeling of carbon nanostructures in diamond like carbon films with the help of Raman scattering and infrared absorption spectra line resolving
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 878825 (May 13, 2013);  doi:10.1117/12.2020385
Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Digital holographic microscopy for the study of nano-fibers
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 87883F (May 13, 2013);  doi:10.1117/12.2020579
Proceedings Volume 8788 (Optical Measurement Systems for Industrial Inspection VIII) >
May 13, 2013
Implementation of a fringe visibility based algorithm in coherence scanning interferometry for surface roughness measurement
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Proc SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII, 87883G (May 13, 2013);  doi:10.1117/12.2020560
Proceedings Volume 8789 (Modeling Aspects in Optical Metrology IV) >
May 13, 2013
Mueller matrix characterization using spectral reflectometry
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Proc SPIE. 8789, Modeling Aspects in Optical Metrology IV, 878903 (May 13, 2013);  doi:10.1117/12.2022549
Proceedings Volume 8789 (Modeling Aspects in Optical Metrology IV) >
May 13, 2013
Numerical investigations of the influence of different commonly applied approximations in scatterometry
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Proc SPIE. 8789, Modeling Aspects in Optical Metrology IV, 878904 (May 13, 2013);  doi:10.1117/12.2022108
Proceedings Volume 8789 (Modeling Aspects in Optical Metrology IV) >
May 13, 2013
A method to measure sub nanometric amplitude displacements based on optical feedback interferometry
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Proc SPIE. 8789, Modeling Aspects in Optical Metrology IV, 878908 (May 13, 2013);  doi:10.1117/12.2019992

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