Self-Nulling Ellipsometer Design

Jack L. Ord

doi:10.1117/12.955542

19 October 1977 Self-Nulling Ellipsometer Design

Jack L. Ord

Proceedings Volume 0112, Optical Polarimetry: Instrumentation and Applications; (1977) https://doi.org/10.1117/12.955542
Event: 21st Annual Technical Symposium, 1977, San Diego, United States

Abstract

The design and performance of a stepping-motor driven self-nulling ellipsometer are described in detail. Three levels of instrumentation are discussed: (i) the basic instrument which has been in use in our laboratory for over ten years, (ii) the addition of a ministepping drive to provide increased resolution, and (iii) the addition of quadrature Faraday modulators to provide increased speed. It is concluded that developments in technology have made this type of instrument an inexpensive alternative to the conventional manual ellipsometer.

Citation Download Citation

Jack L. Ord "Self-Nulling Ellipsometer Design", Proc. SPIE 0112, Optical Polarimetry: Instrumentation and Applications, (19 October 1977); https://doi.org/10.1117/12.955542

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