Position Sensing With Lateral Effect Photodiodes

Brian O. Kelly

doi:10.1117/12.956015

28 February 1978 Position Sensing With Lateral Effect Photodiodes

Brian O. Kelly

Proceedings Volume 0129, Effective Utilization of Optics in Quality Assurance I; (1978) https://doi.org/10.1117/12.956015
Event: Effective Utilization of Optics in Quality Assurance, 1977, Arlington Heights, United States

Abstract

The past several years have seen a dramatic increase in the application of electro-optical techniques to the problems of mechanical alignment. Although these problems have existed for a long time, the applications are new and have required significant developments in position sensing detectors. UDT's lateral effect photodiodes and the systems using them represent state-of-the-art in position sensing. The discussion will include physics of these position sensing detectors and the presently available specifications.

Citation Download Citation

Brian O. Kelly "Position Sensing With Lateral Effect Photodiodes", Proc. SPIE 0129, Effective Utilization of Optics in Quality Assurance I, (28 February 1978); https://doi.org/10.1117/12.956015

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