X-Ray Scattering Of Superpolished Flat Mirror Samples

B. Aschenbach; H. Brauninger; A. Ondrusch; P. Predehl

doi:10.1117/12.933153

24 March 1982 X-Ray Scattering Of Superpolished Flat Mirror Samples

B. Aschenbach, H. Brauninger, A. Ondrusch, P. Predehl

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933153
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

X-ray scattering measurements of flat mirror samples taken with moderate (0.5 arcmin) and high (2.5 arc sec) angular resolution are reported. The measurements cover scatter angles ranging from a few arc seconds to ≈ 1 degree. By using standard scattering theories micro-roughness values are derived and spatial wavelength distributions inherent to the mirror surface are discussed.

Citation Download Citation

B. Aschenbach, H. Brauninger, A. Ondrusch, and P. Predehl "X-Ray Scattering Of Superpolished Flat Mirror Samples", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933153

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