X-Ray Microscopy: Recent Developments And Practical Applications

B. Niemann; G. Schmahl; D. Rudolph

doi:10.1117/12.934316

29 March 1983 X-Ray Microscopy: Recent Developments And Practical Applications

B. Niemann, G. Schmahl, D. Rudolph

Proceedings Volume 0368, Microscopy: Techniques and Capabilities; (1983) https://doi.org/10.1117/12.934316
Event: Microscopy-Techniques and Capabilities, 1982, London, United Kingdom

Abstract

X-ray microscopy using soft X-rays progressed successfully during past years. This paper discusses the atomic cross sections, the photoelectric absorption and the radiation damage for soft X-rays. Resulsts of contact microradiography are summarized. X-ray optics, which can be used for microscopy are zone plates, grazing incidence mirrors and normal incidence multi-layer mirrors, yet this has only been shown in practice with high resolution for zone plates. Details of the "Gottingen X-ray microscope" are given and a photographic image, showing 50 nm resolution, is shown. The future work of several groups is concentrated on the development of scanning X-ray microscopes.

Citation Download Citation

B. Niemann, G. Schmahl, and D. Rudolph "X-Ray Microscopy: Recent Developments And Practical Applications", Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); https://doi.org/10.1117/12.934316

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