Micromechanical Light Modulators For Data Transfer And Processing

Robert E. Brooks

doi:10.1117/12.941409

13 August 1984 Micromechanical Light Modulators For Data Transfer And Processing

Robert E. Brooks

Proceedings Volume 0465, Spatial Light Modulators and Applications I; (1984) https://doi.org/10.1117/12.941409
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

Electromechanical devices can be used to rapidly modulate light if their mechanical inertias can be made small enough. Their usefulness depends on being able to produce them in large arrays with high yield and at low cost, to integrate them with their drive circuitry, and to achieve a high level of reliability and reproducibility. In recent years micromechanical fabrication techniques have been used to produce arrays of miniature optical modulators on silicon that can operate at frequencies up to ~1 MHz with negligible drive power. They are completely compatible with IC technology and can be integrated with elec-tronic circuits. In large arrays they can transfer data at a high rate for parallel optical readout of microelectronic devices and sensor arrays. Once in optical form the data are ameanable to optical processing. This paper discusses the development of the micromechanical modulator, its features, performance characteristics and limitations and a number of potential applications to data transfer and processing.

Citation Download Citation

Robert E. Brooks "Micromechanical Light Modulators For Data Transfer And Processing", Proc. SPIE 0465, Spatial Light Modulators and Applications I, (13 August 1984); https://doi.org/10.1117/12.941409

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