Paper
18 January 1985 Surface Roughness Assessment Using The Angular Distribution Of The Back Scattered Field From A Small Laser Spot
M. A. Younes, J. R. Croft, W. J. Hill
Author Affiliations +
Proceedings Volume 0473, Symposium Optika '84; (1985) https://doi.org/10.1117/12.942403
Event: Symposium Optika '84, 1984, Budapest, Hungary
Abstract
The recent need for some in-process means to measure surface roughness has influenced many studies towards considering optical methods as a potential new tool. Till now published studies are almost all treating cases of smooth surfaces with given height distribution. The present paper presents a preliminary study of a suggested new technique where a very small laser spot interrogates the surface. In the present technique an experimental rig has been constructed, whereby the intensity of the light scattered from the laser spot interrogating the surface point by point can be scanned over a complete hemisphere. The intensity values are collected and stored for subsequent analysis. The whole system including drive of the photodetectors, drive of the test specimen and data acquisition works under computer control. Results from the optical method are compred with the theoretical intensity values calculated for the digitized height values obtained from Talysurf traces of the surface.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. A. Younes, J. R. Croft, and W. J. Hill "Surface Roughness Assessment Using The Angular Distribution Of The Back Scattered Field From A Small Laser Spot", Proc. SPIE 0473, Symposium Optika '84, (18 January 1985); https://doi.org/10.1117/12.942403
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KEYWORDS
Surface roughness

Photodiodes

Laser scattering

Radium

Light scattering

Beam splitters

Calibration

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