Instrument For Angle-Resolved Measurement Of Scattered Light In The VUV-Visible Wavelength Region

Lars Mattsson

doi:10.1117/12.946363

3 September 1985 Instrument For Angle-Resolved Measurement Of Scattered Light In The VUV-Visible Wavelength Region

Lars Mattsson

Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985) https://doi.org/10.1117/12.946363
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

A high vacuum instrument for angle-resolved scattering studies in the 30 nm - 633 nm wavelength region has been built. Scattering can be measured at nearly all angles, not only in the plane of incidence, but also out of the incident plane by mounting the detectors on a trolley on a semi-circular rotatable arm. The sample is mounted on an XYZ-translator which also allows the angle of incidence to be continuously varied from 0 to 900. Three inter-changable detectors, two PM-tubes and one channel electron multiplier cover the complete wavelength region of interest. The spherical geometry of the detection system assures that the same part of the detector surface is used at all detection positions. Because of its flexible detector and sample positioning system, the instrument also provides an easy-to-use reflectance and transmittance measurement system. The instrument can be adapted to any light source. At present we make use of a resonance light source, A 58.4 nm for the VUV and a HeNe-laser for the visible. Monochromatized mercury and deuterium radiation will soon be provided for the UV and visible regions.

Citation Download Citation

Lars Mattsson "Instrument For Angle-Resolved Measurement Of Scattered Light In The VUV-Visible Wavelength Region", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); https://doi.org/10.1117/12.946363

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available