Multiple Flash Overlap Defect In Photomasks

S. N. Gupta; A. K. Bagchi; N. N. Kundu

doi:10.1117/12.947760

23 July 1985 Multiple Flash Overlap Defect In Photomasks

S. N. Gupta, A. K. Bagchi, N. N. Kundu

Proceedings Volume 0538, Optical Microlithography IV; (1985) https://doi.org/10.1117/12.947760
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

Photomasks are in widespread use in production of integrated circuits either in the form of reticles or step-and-repeated working masks. The quality of these masks depends on control in both line dimensions and defect density. Unders'tanding of defect generation mechanism has been a topic of extensive study in the past. In this paper, defect caused by over-lapping flashes, exposed by an optical pattern generator on emulsion photoplates, has been reported. It has been observed that pattern generator data tapes produced by computer-aided-design (CAD) systems often contains flashes that overlap in edges or corners. This causes a distortion in line demensions and can be a serious limitation when the design rules in mask layout are quite tight. In this paper, we have discussed the effect of this overlap, its causes and possible remedies. It has been further shown that the removal of overlapping flashes from critical areas can improve the quality of the reticle.

Citation Download Citation

S. N. Gupta, A. K. Bagchi, and N. N. Kundu "Multiple Flash Overlap Defect In Photomasks", Proc. SPIE 0538, Optical Microlithography IV, (23 July 1985); https://doi.org/10.1117/12.947760

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available