Investigation On The Second Optical Inspection Of ICs

G. Schreurs; E. Bellon; M. Vercruyssen; A . Oosterlinck

doi:10.1117/12.966268

19 December 1985 Investigation On The Second Optical Inspection Of ICs

G. Schreurs, E. Bellon, M. Vercruyssen, A . Oosterlinck

Proceedings Volume 0557, Automatic Inspection and Measurement; (1985) https://doi.org/10.1117/12.966268
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

This paper presents a study on the automatic second optical inspection of ICs. The emphasis lays on the image processing algorithms. A distinction is made between "primary feature inspection" and "morphologic feature inspection". Both reference and non-reference methods are considered. In each case, inspection in one pass is possible. Some results are given and discussed.

Citation Download Citation

G. Schreurs, E. Bellon, M. Vercruyssen, and A . Oosterlinck "Investigation On The Second Optical Inspection Of ICs", Proc. SPIE 0557, Automatic Inspection and Measurement, (19 December 1985); https://doi.org/10.1117/12.966268

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