Precision Laser Micromachining

Jerry Boogaard

doi:10.1117/12.956411

7 July 1986 Precision Laser Micromachining

Jerry Boogaard

Proceedings Volume 0611, Laser Processing of Semiconductors & Hybrids; (1986) https://doi.org/10.1117/12.956411
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

Lasers continue to enter many exciting new fields that have been traditionally the domain of other equipment. Lately, lasers and their associated precision positioning equipment have replaced the more conventional methods used in the micromachining area because of better control, repeatability and precision. This paper discusses some of the latest applications of laser micromachining utilizing a medium-powered Nd:YAG laser. Topics will include machining ceramics, silicon and other materials as well as precise removal of thin films from various substrates. Some of the techniques created to accomplish the required results will be shown as well as improvements over previous methods.

Citation Download Citation

Jerry Boogaard "Precision Laser Micromachining", Proc. SPIE 0611, Laser Processing of Semiconductors & Hybrids, (7 July 1986); https://doi.org/10.1117/12.956411

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