Ion And Photon-Beam Assisted Deposition Of Thin Films

H A Macleod

doi:10.1117/12.938384

13 October 1986 Ion And Photon-Beam Assisted Deposition Of Thin Films

H A Macleod

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938384
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Optical-coatings problems can be traced to the microstructure inherent in the optical-coating process of thermal evaporation in vacuo. Ion and photon bombardment techniques have been associated in various ways with thin-film deposition. Some processes that incorporate these techniques improve optical-coating performance. Processes relevant to optical-coating construction are surveyed and some recent results are discussed. Ion-assisted deposition and laser evaporation are identified as particularly promising optical coatings.

Citation Download Citation

H A Macleod "Ion And Photon-Beam Assisted Deposition Of Thin Films", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938384

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