Excimer Lasers

Robert C. Sze

doi:10.1117/12.937034

10 July 1987 Excimer Lasers

Robert C. Sze

Proceedings Volume 0701, 1986 European Conf on Optics, Optical Systems and Applications; (1987) https://doi.org/10.1117/12.937034
Event: 1986 International European Conference on Optics, Optical Systems, and Applications, 1986, Florence, Italy

Abstract

A history of excimer laser discharge techniques is discussed. Emphasis is placed on techniques required for dependable, long-lived, commercial devices.

Citation Download Citation

Robert C. Sze "Excimer Lasers", Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); https://doi.org/10.1117/12.937034

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