"Performance Of A Wafer Stepper With Automatic Intra-Die Registration Correction."

M. A. van den Brink; S. Wittekoek; H. F. D. Linders; F. J. van Hout; R. A. George

doi:10.1117/12.967039

1 January 1987 "Performance Of A Wafer Stepper With Automatic Intra-Die Registration Correction."

M. A. van den Brink, S. Wittekoek, H. F. D. Linders, F. J. van Hout, R. A. George

Proceedings Volume 0772, Optical Microlithography VI; (1987) https://doi.org/10.1117/12.967039
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

An evaluation of a wafer stepper with the new improved Philips/ASM-L phase grating alignment system is reported. It is shown that an accurate alignment system needs an accurate X-Y-0 wafer stage and an accurate reticle Z stage to realize optimum overlay accuracy. This follows from a discussion of the overlay budget and an alignment procedure model. The accurate wafer stage permits high overlay accuracy using global alignment only, thus eliminating the throughput penalty of align-by-field schemes. The accurate reticle Z stage enables an intra-die magnification control with respect to the wafer scale. Various overlay data are reported, which have been measured with the automatic metrology program of the stepper. It is demonstrated that the new dual alignment system (with the external spatial filter) has improved the ability to align to weakly reflecting layers. The results are supported by a Fourier analysis of the alignment signal. Resolution data are given for the PAS 2500 projection lenses, which show that the high overlay accuracy of the system is properly matched with submicron linewidth control. The results of a recently introduced 20mm i-line lens with a numerical aperture of 0.4 (Zeiss 10-78-58) are included.

Citation Download Citation

M. A. van den Brink, S. Wittekoek, H. F. D. Linders, F. J. van Hout, and R. A. George ""Performance Of A Wafer Stepper With Automatic Intra-Die Registration Correction."", Proc. SPIE 0772, Optical Microlithography VI, (1 January 1987); https://doi.org/10.1117/12.967039

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available