Mapping The Performance Of Surface-Measuring Instruments

Margaret Stedman

doi:10.1117/12.941285

11 January 1987 Mapping The Performance Of Surface-Measuring Instruments

Margaret Stedman

Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941285
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

The performance of a dimensional surface-measuring instrument is usually limited by a small number of critical components or specifications. For example, parameters such as those specifying ranges and resolutions, and probe geometry are needed to define the capabilities of the instrument. The response of the instrument to sinusoidal perturbations of varying amplitude and wavelength, can be mapped in amplitude-wavelength space to show the effect of each parameter and the overall limits of performance.

Citation Download Citation

Margaret Stedman "Mapping The Performance Of Surface-Measuring Instruments", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); https://doi.org/10.1117/12.941285

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