Characterization Of Process Variability Using Robust Data Summaries

Michael S. Mahaney; G. Rex Bryce

doi:10.1117/12.968375

1 January 1988 Characterization Of Process Variability Using Robust Data Summaries

Michael S. Mahaney, G. Rex Bryce

Proceedings Volume 0921, Integrated Circuit Metrology, Inspection, and Process Control II; (1988) https://doi.org/10.1117/12.968375
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

A data summation method is described that employs summary statistics that are relatively insensitive ("robust") to the presence of spurious observations ("outliers"). The method is quick; it is accurate both with and without outliers present; and it is simple for users to understand. It is then shown that these summary statistics can be used to construct variance component estimators, key tools in process improvement and control. The estimators presented are simpler than the conventional variance component estimators and have significantly smaller data storage requirements.

Citation Download Citation

Michael S. Mahaney and G. Rex Bryce "Characterization Of Process Variability Using Robust Data Summaries", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); https://doi.org/10.1117/12.968375

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