Laser-Assisted Molecular Beam Epitaxical Growth Of GaAs On Si (100)

F. J. Grunthaner; A. Madhukar; J. K. Liu; P. D. Lao; W. C. Tang; S. Guha

doi:10.1117/12.947382

15 August 1988 Laser-Assisted Molecular Beam Epitaxical Growth Of GaAs On Si (100)

F. J. Grunthaner, A. Madhukar, J. K. Liu, P. D. Lao, W. C. Tang, S. Guha

Proceedings Volume 0944, Growth of Compound Semiconductor Structures II; (1988) https://doi.org/10.1117/12.947382
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

We have grown GaAs on Si (100) substrates misoriented 4° from the [110] direction using a KrF pulsed excimer laser-assisted Molecular Beam Epitaxy. In this work, we report the systematic study of 2000 A GaAs films grown on Si using a two step growth sequence. Raman scattering, Rayleigh scattering, near band edge photoluminescence, cross-sectional TEM microscopy, in situ RHEED, and optical surface roughness profiles are used to characterize the differences between laser irradiated and non-irradiated areas of the samples. We find a reduction of defects, an enhancement of photoluminescence intensity, and no evidence for laser-induced melting for power levels of up to 25 MW/cm². Photoluminescence linewidths at 4.5K are comparable to widths observed for 1 micrometer thick GaAs films grown on Si.

Citation Download Citation

F. J. Grunthaner, A. Madhukar, J. K. Liu, P. D. Lao, W. C. Tang, and S. Guha "Laser-Assisted Molecular Beam Epitaxical Growth Of GaAs On Si (100)", Proc. SPIE 0944, Growth of Compound Semiconductor Structures II, (15 August 1988); https://doi.org/10.1117/12.947382

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available