Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry

R. Brodmann; M. Allgauer

doi:10.1117/12.949161

21 March 1989 Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry

R. Brodmann, M. Allgauer

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949161
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Light scattering and non-contact sensing of rough surfaces with a laser focus are two optical methods which recently have also become available as commercial instruments. Optical measurements are compared with mechanical stylus measurements and the results are discussed under consideration of the physics of the different measuring principles.

Citation Download Citation

R. Brodmann and M. Allgauer "Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949161

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