Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection

Gilles Grand; Michel Darboux; frederic Moisan

doi:10.1117/12.949247

15 February 1989 Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection

Gilles Grand, Michel Darboux, frederic Moisan

Author Affiliations +

Proceedings Volume 1010, Industrial Inspection; (1989) https://doi.org/10.1117/12.949247
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

This optimisation method is based on the well-known effect of reflectance variation as a function of wavelength, for thin film structures. Wavelength spectra acquisition for the various structures are basic data of an adapted wavelength filter calculation. Both this calculation and an original optical apparatus allow implementation in a fully automated integrated circuits inspection machine. We present photometric measurements attesting of method reliability, and final inspection results on images with defects, showing improvement that contrast optimisation can bring.

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Gilles Grand, Michel Darboux, and frederic Moisan "Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection", Proc. SPIE 1010, Industrial Inspection, (15 February 1989); https://doi.org/10.1117/12.949247

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