The effect of dynamic etching on surface quality and laser damage resistance for fused silica optics

Zhiqiang Wang; Hongwei Yan; Xiaodong Yuan; Yuan Li; Ke Yang; Lianghong Yan; Lijuan Zhang; Taixiang Liu; Heyang Li

doi:10.1117/12.2267494

12 May 2017 The effect of dynamic etching on surface quality and laser damage resistance for fused silica optics

Zhiqiang Wang, Hongwei Yan, Xiaodong Yuan, Yuan Li, Ke Yang, Lianghong Yan, Lijuan Zhang, Taixiang Liu, Heyang Li

Proceedings Volume 10173, Fourth International Symposium on Laser Interaction with Matter; 1017325 (2017) https://doi.org/10.1117/12.2267494
Event: 4th International Symposium on Laser Interaction with Matter, 2016, Chengdu, China

Abstract

Fused silica optics were treated by dynamic etching using buffered hydrofluoric acid (BHF) with different etching depths. The transmissivity of fused silica slightly increases in deep UV (DUV) range after dynamic etching. Surface qualities of fused silica were characterized in terms of surface roughness, surface profile and photoluminescence (PL) spectra. The results show that dynamic etching has a slight impact on surface RMS roughness.PL defects gradually reduces by dynamic etching, and laser damage resistance of fused silica continuously increases with etching depth extending. When removal depth increases to ~12μm, the damage threshold is the double that of the unetched surface. However, surface profile continuously deteriorates with etching depth increasing. Appropriate etching amount is very important for improving damage resistance and mitigating surface profile deteriorating of fused silica during etching process simultaneously. The study is expected to contribute to the practical application of dynamic etching for mitigating laser induced degradation of fused silica optics under UV laser irradiation.

Citation Download Citation

Zhiqiang Wang, Hongwei Yan, Xiaodong Yuan, Yuan Li, Ke Yang, Lianghong Yan, Lijuan Zhang, Taixiang Liu, and Heyang Li "The effect of dynamic etching on surface quality and laser damage resistance for fused silica optics", Proc. SPIE 10173, Fourth International Symposium on Laser Interaction with Matter, 1017325 (12 May 2017); https://doi.org/10.1117/12.2267494

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available