Excimer Lasers And Geometric Optics

Klaus Schildbach

doi:10.1117/12.950138

26 April 1989 Excimer Lasers And Geometric Optics

Klaus Schildbach

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950138
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The beam properties of a typical excimer laser with plane parallel mirrors can be approximately described from the geometric optics point of view as a superposition of ray bundles with locally varying angular distributions. These distributions have been measured by recording the far-field intensity after a small aperture shifted transversally through the beam. The characteristic differences to the situation at e.g. an incoherent source and an ideal laser with a stable resonator and the consequences for imaging are discussed within this framework.

Citation Download Citation

Klaus Schildbach "Excimer Lasers And Geometric Optics", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950138

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