Numbers Of Merit In Excimer Laser Reliability Analysis

Lindsay Austin; Dirk Basting; Hans-Jurgen Kahlert; Ulrich Rebhan; Wolfgang Muckenheim

doi:10.1117/12.950137

26 April 1989 Numbers Of Merit In Excimer Laser Reliability Analysis

Lindsay Austin, Dirk Basting, Hans-Jurgen Kahlert, Ulrich Rebhan, Wolfgang Muckenheim

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950137
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Recent results confirm new advances in XeC1 excimer laser discharge design have achieved major milestones in reliability - 1010 pulses without replacing the thyratron, electrodes, capacitors or power supply. Other data on standard KrF excimer lasers allow statistical analysis of numbers of merit, including MTBF and maintenance intervals. Projections are made of operating costs and maintenance for both continuous operation and low duty cycle of two different size lasers with all major gases: XeCl, KrF and ArF.

Citation Download Citation

Lindsay Austin, Dirk Basting, Hans-Jurgen Kahlert, Ulrich Rebhan, and Wolfgang Muckenheim "Numbers Of Merit In Excimer Laser Reliability Analysis", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950137

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