Aspheric surface measurement using capacitive probes

Xin Tao; Daocheng Yuan; Shaobo Li

doi:10.1117/12.2260661

28 February 2017 Aspheric surface measurement using capacitive probes

Xin Tao, Daocheng Yuan, Shaobo Li

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102564X (2017) https://doi.org/10.1117/12.2260661
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

With the application of aspheres in optical fields, high precision and high efficiency aspheric surface metrology becomes a hot research topic. We describe a novel method of non-contact measurement of aspheric surface with capacitive probe. Taking an eccentric spherical surface as the object of study, the averaging effect of capacitive probe measurement and the influence of tilting the capacitive probe on the measurement results are investigated. By comparing measurement results from simultaneous measurement of the capacitive probe and contact probe of roundness instrument, this paper indicates the feasibility of using capacitive probes to test aspheric surface and proposes the compensation method of measurement error caused by averaging effect and the tilting of the capacitive probe.

Citation Download Citation

Xin Tao, Daocheng Yuan, and Shaobo Li "Aspheric surface measurement using capacitive probes", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102564X (28 February 2017); https://doi.org/10.1117/12.2260661

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