The Velociprobe: A fast hard x-ray nanoprobe for ptychographic imaging (Conference Presentation)

Junjing Deng; Curt A. Preissner; Christian Roehrig; Michael Wojcik; Shane Sullivan; David J. Vine; Barry Lai; Stefan Vogt

doi:10.1117/12.2276502

19 September 2017 The Velociprobe: A fast hard x-ray nanoprobe for ptychographic imaging (Conference Presentation)

Junjing Deng, Curt A. Preissner, Christian Roehrig, Michael Wojcik, Shane Sullivan, David J. Vine, Barry Lai, Stefan Vogt

Author Affiliations +

Proceedings Volume 10389, X-Ray Nanoimaging: Instruments and Methods III; 103890M (2017) https://doi.org/10.1117/12.2276502
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Motivated by the Advanced Photon Source Upgrade (APS-U), a new hard X-ray microscope called “Velociprobe” has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware/stage designs, new positioner control designs, and new data acquisition strategies, including the use of high bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed high-precision motion of the probe over the sample. Our primary goal is to use this instrument to demonstrate sub-10 nm spatial resolution ptychography over a 1-square-micron area in under 10 seconds. We have also designed the instrument to take advantage of the upgraded source when the APS-U is completed. This presentation will describe the unique designs and characteristics of this instrument, and some preliminary data obtained during the instrument commission.

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Junjing Deng, Curt A. Preissner, Christian Roehrig, Michael Wojcik, Shane Sullivan, David J. Vine, Barry Lai, and Stefan Vogt "The Velociprobe: A fast hard x-ray nanoprobe for ptychographic imaging (Conference Presentation)", Proc. SPIE 10389, X-Ray Nanoimaging: Instruments and Methods III, 103890M (19 September 2017); https://doi.org/10.1117/12.2276502

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KEYWORDS

Hard x-rays

Nanoprobes

Microscopes

Spatial resolution

Data acquisition

Interferometry

Nanoimaging

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