Uncertainty analysis of distortion measurement of laser differential confocal by different evaluation methods

Quan Yuan; Yi Yang; Lin Zhang; Zhendong Shi; Hua Ma; Huan Ren

doi:10.1117/12.2282996

24 October 2017 Uncertainty analysis of distortion measurement of laser differential confocal by different evaluation methods

Quan Yuan, Yi Yang, Lin Zhang, Zhendong Shi, Hua Ma, Huan Ren

Author Affiliations +

Proceedings Volume 10457, AOPC 2017: Laser Components, Systems, and Applications; 104570L (2017) https://doi.org/10.1117/12.2282996
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China

Abstract

The focal length is one of the important parameters in the optical element, and the high precision measurement of the focal length has become a key problem in the processing and use of the optical element. The laser differential confocal length measurement system is introduced, and the uncertainty of the two sets of focal length measurement is evaluated. The relative error (K = 2) is better than 4.77×10^-5, and the relative error is 0.00025%.

Citation Download Citation

Quan Yuan, Yi Yang, Lin Zhang, Zhendong Shi, Hua Ma, and Huan Ren "Uncertainty analysis of distortion measurement of laser differential confocal by different evaluation methods", Proc. SPIE 10457, AOPC 2017: Laser Components, Systems, and Applications, 104570L (24 October 2017); https://doi.org/10.1117/12.2282996

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