A self-aligned dry etching method for mechanical strain enhancement of germanium and its uniformity improvement for photonic applications

Yiding Lin; Danhao Ma; Kwang Hong Lee; Jurgen Michel; Chuan Seng Tan

doi:10.1117/12.2288154

22 February 2018 A self-aligned dry etching method for mechanical strain enhancement of germanium and its uniformity improvement for photonic applications

Yiding Lin, Danhao Ma, Kwang Hong Lee, Jurgen Michel, Chuan Seng Tan

Author Affiliations +

Proceedings Volume 10537, Silicon Photonics XIII; 1053704 (2018) https://doi.org/10.1117/12.2288154
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

A self-aligned dry etching method was proposed and verified theoretically to enhance the magnitude and simultaneously improve the uniformity of the tensile strain in a germanium (Ge) wave-guide (WG), with the help of tensile-stressed SiN stressor at the WG sidewalls. The SiN-strained germanium-on-insulator (GOI) WG was also experimentally demonstrated. Significant tensile strain was observed in the Ge material via micro-Raman measurements. This method could potentially facilitate a Ge photodetector with its optical detection range extended further towards longer wavelength and to be comparable with that of state-of-the-art InGaAs detectors.

Conference Presentation

Citation Download Citation

Yiding Lin, Danhao Ma, Kwang Hong Lee, Jurgen Michel, and Chuan Seng Tan "A self-aligned dry etching method for mechanical strain enhancement of germanium and its uniformity improvement for photonic applications", Proc. SPIE 10537, Silicon Photonics XIII, 1053704 (22 February 2018); https://doi.org/10.1117/12.2288154

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available