Improving the environmental stability of e-beam coatings by employing a PIAD capping layer

Tingting Zeng; Meiping Zhu; Yingjie Chai; Rongjun Zhang; Huasong Liu; Chaoyi Yin; Nuo Xu; Jianda Shao

doi:10.1117/12.2317775

16 May 2018 Improving the environmental stability of e-beam coatings by employing a PIAD capping layer

Tingting Zeng, Meiping Zhu, Yingjie Chai, Rongjun Zhang, Huasong Liu, Chaoyi Yin, Nuo Xu, Jianda Shao

Proceedings Volume 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers; 107130B (2018) https://doi.org/10.1117/12.2317775
Event: Pacific Rim Laser Damage 2018: Optical Materials for High Power Lasers, 2018, Yokohama, Japan

Abstract

The properties of coatings deposited by electronic beam (e-beam) technique can be easily influenced by environmental humidity, causing spectrum shift, residual stress evolution, and wave front errors. In this work, HfO₂/SiO₂ multilayer coatings with different overcoat layer deposition process were prepared. The optical spectrum shift caused by atmosphere-vacuum effect of the prepared samples was investigated by spectrometer. The laser-induced damage resistance was studied and the damage morphologies were characterized by Scanning Electron Microscope (SEM). The surface morphology and global coating stress of the films were analyzed by Atomic Force Microscope (AFM) and Zygo interferometer, respectively. The experimental results demonstrate that by a capping SiO₂ layer employed by plasma ion assisted deposition (PIAD), considerable stability concerning the environmental stability of e-beam coatings can be improved due to delayed water vapor transport rate. A relatively smaller grain size can be obtained as well. Moreover, the laser- induced damage threshold (LIDT) shows no significant differences.

Citation Download Citation

Tingting Zeng, Meiping Zhu, Yingjie Chai, Rongjun Zhang, Huasong Liu, Chaoyi Yin, Nuo Xu, and Jianda Shao "Improving the environmental stability of e-beam coatings by employing a PIAD capping layer", Proc. SPIE 10713, Pacific-Rim Laser Damage 2018: Optical Materials for High-Power Lasers, 107130B (16 May 2018); https://doi.org/10.1117/12.2317775

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