Multi-ring artifact for performance evaluation experiments on probing system combinations

Sen Zhou; Jian Xu; Long Wang III; Lei Tao; Yan Yu; Yueqing Ding

doi:10.1117/12.2323647

9 November 2018 Multi-ring artifact for performance evaluation experiments on probing system combinations

Sen Zhou, Jian Xu, Long Wang III, Lei Tao, Yan Yu, Yueqing Ding

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081917 (2018) https://doi.org/10.1117/12.2323647
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

A CMM with multiple probing systems have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high automation, high integration and high precision. These probing system combinations must be tested to check their compliance with the specifications and to trace back the measurement results. In this paper, we present a novel multi-ring artifact and appropriate test procedures for probing system combinations similar to the well-known test procedures described in the ISO standard 10360-9. The characteristic of multi-rings artifact is keeping topology geometric relationships among 2D rings. Then, a series of representative experiments were carried out on a commercial combined probing system equipped with an imaging probe and a line laser scanner, and results have proved such multi-ring artifact as a fast way for performance test.

Citation Download Citation

Sen Zhou, Jian Xu, Long Wang III, Lei Tao, Yan Yu, and Yueqing Ding "Multi-ring artifact for performance evaluation experiments on probing system combinations", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081917 (9 November 2018); https://doi.org/10.1117/12.2323647

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