Automatic parameter setting for lens aberration control during product lot exposure

Yutaka Kanakutsu; Yukio Koizumi; Hironori Ikezawa; Shigeru Eto; Junji Ikeda; Takenori Takeuchi; Tomoyuki Matsuyama; Edward Stan; Ronald Hiltunen

doi:10.1117/12.2514917

20 March 2019 Automatic parameter setting for lens aberration control during product lot exposure

Yutaka Kanakutsu, Yukio Koizumi, Hironori Ikezawa, Shigeru Eto, Junji Ikeda, Takenori Takeuchi, Tomoyuki Matsuyama, Edward Stan, Ronald Hiltunen

Author Affiliations +

Proceedings Volume 10961, Optical Microlithography XXXII; 109610M (2019) https://doi.org/10.1117/12.2514917
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

We have developed an automatic lens control and parameter settings scheme (on-product iLC) for thermal aberration predictive (feedforward) and calibration (feedback) control. Thermal aberration control is essential for critical layers, and lens control parameter setup time reduction is imperative in maximizing scanner uptime. In our experiment, during production lot exposure the new scheme automatically corrected lens control parameters to within sufficient imaging accuracy tolerances, and demonstrated a dramatic reduction in layer setup time compared with the conventional approach, and we will discuss an actual use-case in this paper.

Citation Download Citation

Yutaka Kanakutsu, Yukio Koizumi, Hironori Ikezawa, Shigeru Eto, Junji Ikeda, Takenori Takeuchi, Tomoyuki Matsuyama, Edward Stan, and Ronald Hiltunen "Automatic parameter setting for lens aberration control during product lot exposure", Proc. SPIE 10961, Optical Microlithography XXXII, 109610M (20 March 2019); https://doi.org/10.1117/12.2514917

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available