Generation of asymmetrical Bessel-like laser beams for glass dicing

Juozas Dudutis; Rokas Stonys; Gediminas Račiukaitis; Paulius Gečys

doi:10.1117/12.2524473

9 September 2019 Generation of asymmetrical Bessel-like laser beams for glass dicing

Juozas Dudutis, Rokas Stonys, Gediminas Račiukaitis, Paulius Gečys

Proceedings Volume 11107, Laser Beam Shaping XIX; 1110709 (2019) https://doi.org/10.1117/12.2524473
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

The intra-distance between laser-induced modifications is the limiting factor of glass dicing speed and efficiency. In this work, we present a novel method for the generation of directional cracks in the bulk of glass to enhance the dicing performance. The asymmetrical Bessel-like laser beams with a long non-diffractive length were formed by filtering their spectra of spatial frequencies. Experiments were carried out using the mJ-level laser source with sub-nanosecond pulse duration. The dicing process was optimised by varying processing parameters. The flexural strength of the modified material was measured using the four-point bending setup. Results showed that asymmetrical intensity distribution enables higher dicing speed, better cleavability and quality, compared to symmetrical Bessel-like laser beams.

Conference Presentation

Citation Download Citation

Juozas Dudutis, Rokas Stonys, Gediminas Račiukaitis, and Paulius Gečys "Generation of asymmetrical Bessel-like laser beams for glass dicing", Proc. SPIE 11107, Laser Beam Shaping XIX, 1110709 (9 September 2019); https://doi.org/10.1117/12.2524473

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