Application Of Zone Plates In Interferometric Positioning

Zbigniew Jaroszewicz; Vicente Moreno; Salvador Bara Vinas

doi:10.1117/12.961279

3 April 1989 Application Of Zone Plates In Interferometric Positioning

Zbigniew Jaroszewicz, Vicente Moreno, Salvador Bara Vinas

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961279
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

The usefullness of the zone plates (ZP) to the optical alignment and displacements measurement is discussed basing on examples of parabolic (PZP) and equilateral hyperbolic ZP (EHZP). Any displacement of the ZP from the position occupied during its recording creates the interference patterns between diffracted beam and its undiffracted counterpart. The shape of this pattern is explicitly determined by the kind and range of the misalignment. The PZP enables the accurate measurement of the linear motion in the direction parallel to the foci line with the control of undesired deviations in perpendicular directions. EHZP offers a possibility of strict point positioning for all possible degrees of movement freedom (including in-plane rotations), in contrary to the commonly used spherical ZP. Simple experiments supporting the analysis are presented.

Citation Download Citation

Zbigniew Jaroszewicz, Vicente Moreno, and Salvador Bara Vinas "Application Of Zone Plates In Interferometric Positioning", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961279

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