Phase Demodulation Of Interference Fringes With Spatial Carrier

Satoru Toyooka

doi:10.1117/12.961266

3 April 1989 Phase Demodulation Of Interference Fringes With Spatial Carrier

Satoru Toyooka

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961266
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

A simple method to retrieve phase modulation of interference fringes with spatial carrier is discussed. A part of the argorithm can be easily replaced by a hardware system of analogue electronic circuite. It is shown that the method is suitable to analyze dynamic fringes which have rather small phase gradient. As an example, displacement measurement by using a modified Michelon interferometer is shown. Accurate measurement in which random errors were less than 7 nm was realized by a simple hand-fablicated system.

Citation Download Citation

Satoru Toyooka "Phase Demodulation Of Interference Fringes With Spatial Carrier", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961266

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