Excimer Lasers For Lithography Applications

Elmar Cullmann

doi:10.1117/12.961751

11 October 1989 Excimer Lasers For Lithography Applications

Elmar Cullmann

Proceedings Volume 1138, Optical Microlithography and Metrology for Microcircuit Fabrication; (1989) https://doi.org/10.1117/12.961751
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

The advantage of excimer lasers over conventional UV lamps for microlithography will be discussed and the difficulties encountered will be reviewed. The first application of excimer lasers was in contact printing where the short wavelength of 193 nm of ArF is used to produce sub-half-micron resolution typically on GaAs chips. The first use of excimer lasers in the field of projection printing was in the area of reticle manufacturing. 308 nm XeC1 lasers are used in pattern generators to produce the pixels of the reticle pattern. A very promising field of applications is in the domaine of reduction wafer steppers which produce a demagnified image of the reticle on silicon wafer. Despite the numerous problems in designing a DUV stepper, the wafer stepper with excimer laser source seems to be the logical choice for the next generation of highly integrated circuit manufacturing. Finally, a promising but still distant possible application could be a 1 : 1 print using phase conjugation to circumvent the need for highly sophisticated optics between reticle and wafer.

Citation Download Citation

Elmar Cullmann "Excimer Lasers For Lithography Applications", Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); https://doi.org/10.1117/12.961751

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available