Surface scratch detection system based on differential interference contrast (DIC)

Zhongchao Liang; Yan Li

doi:10.1117/12.2550231

12 March 2020 Surface scratch detection system based on differential interference contrast (DIC)

Zhongchao Liang, Yan Li

Proceedings Volume 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 114341G (2020) https://doi.org/10.1117/12.2550231
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China

Abstract

In this paper, we provide a high-speed large-field DIC imaging method and corresponding system with sufficient scanning efficiency for real industry, which makes it applicable for in-line surface scratch detection of cellphone panel. The work mainly involves: 1. basic principles of traditional DIC methods and the line-scan improving scheme for high-speed large-field imaging: 2. key techniques of system integration such as motion control and data synchronized acquisition.

Citation Download Citation

Zhongchao Liang and Yan Li "Surface scratch detection system based on differential interference contrast (DIC)", Proc. SPIE 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 114341G (12 March 2020); https://doi.org/10.1117/12.2550231

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