Effect of Ge profiles on the performance of lateral SiGe heterojunction bipolar transistors with substrate bias

Dongyue Jin; Ling Wu; Wanrong Zhang; Bin Guo; Shaomeng Yang; Sheng Sun

doi:10.1117/12.2561863

17 April 2020 Effect of Ge profiles on the performance of lateral SiGe heterojunction bipolar transistors with substrate bias

Dongyue Jin, Ling Wu, Wanrong Zhang, Bin Guo, Shaomeng Yang, Sheng Sun

Author Affiliations +

Proceedings Volume 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications; 114551S (2020) https://doi.org/10.1117/12.2561863
Event: Sixth Symposium on Novel Photoelectronic Detection Technology and Application, 2019, Beijing, China

Abstract

In the paper, the effect of Ge profiles on the performance of lateral SiGe heterojunction bipolar transistor (LHBT) on silicon-on-insulator (SOI) substrate with positive bias voltage has been studied. With the aid of substrate bias (V_S), the peak current gain (β) of LHBT with trapezoidal Ge profile is obviously enhanced, which is almost as same as LHBT with uniform Ge profile. At the same time, the β of LHBT with trapezoidal Ge profile is kept as temperature increases. However, the β of LHBT with uniform Ge profile is decreased as temperature increases. Furthermore, for LHBT with trapezoidal Ge profile, the peak junction temperature is lowered by 20.51K and the cut-off frequency (f_T) is also improved by 158.4 GHz when compared with that of the uniform one. The results show that LHBTs with trapezoidal Ge profile could achieve the superior electrical, thermal, and high frequency performance at the same time, which provides useful guidelines to design SiGe HBTs for microwave and digital or mixed-signal applications.

Citation Download Citation

Dongyue Jin, Ling Wu, Wanrong Zhang, Bin Guo, Shaomeng Yang, and Sheng Sun "Effect of Ge profiles on the performance of lateral SiGe heterojunction bipolar transistors with substrate bias", Proc. SPIE 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications, 114551S (17 April 2020); https://doi.org/10.1117/12.2561863

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