Diamondlike Films From Solid, Liquid And Gaseous Sources

K. S. Harshavardhan; R. S. Yalamanchi

doi:10.1117/12.962070

15 January 1989 Diamondlike Films From Solid, Liquid And Gaseous Sources

K. S. Harshavardhan, R. S. Yalamanchi

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962070
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Diamondlike films synthesized from liquid and gaseous sources have been reviewed and a novel process of synthesis from a solid (non-graphitic) geomorph has been reported for the first time. The compositions of the gaseous precursors have been identified by mass spectrometry. The diamondlike features have been studied by a combined analyses of microhardness, electrical resistivity, optical transparency over a wide wavelength range and chemical inertness. Laser crystallisation studies were carried out using a Nd : YAG laser. The formation of diamond was corroborated by Laser Raman scattering analysis and x-ray photoelectron spectroscopy. The effect of additive gases on the film properties, viz., stress, transparency and adhesion, critical for optical applications have been studied and an optimized parameter space established. The process parameters were utilized to generate hard, low-stress films over infrared (m) optical components.

Citation Download Citation

K. S. Harshavardhan and R. S. Yalamanchi "Diamondlike Films From Solid, Liquid And Gaseous Sources", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962070

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