Influence Of Ion Irradiation On The Properties Of Diamond-Like Carbon Films

Fangqing Zhang; Yafei Zhang; Zhihao Zheng; Guanghua Chen

doi:10.1117/12.962082

15 January 1989 Influence Of Ion Irradiation On The Properties Of Diamond-Like Carbon Films

Fangqing Zhang, Yafei Zhang, Zhihao Zheng, Guanghua Chen

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962082
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The influence of argon ion and CO₂ laser irradiation on the structure properties of diamond-like carbon films is reported. The structure ratio of sp²/sp³-CH bond in the films increases as the argon ion irradiates while it decreases as the CO₂ laser irradiates , which show that the argon ion irradiation is main for breaking the C-H bond while the laser irradiation is a kind of process of thermal annealing.

Citation Download Citation

Fangqing Zhang, Yafei Zhang, Zhihao Zheng, and Guanghua Chen "Influence Of Ion Irradiation On The Properties Of Diamond-Like Carbon Films", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962082

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