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Production of over 600 ultra-smooth mirrors has been achieved by JTEC Corporation since 2006, which can be recognized as the evidence of large contribution to development of x-ray optics. To fabricate these mirrors, extremely high-accuracy surface shape measurement technology is necessary, therefore, RADSI, which is developed by Osaka University, has been applied to the manufacturing over the ages [1, 2]. In recent years, however, according to the growth of demand for a higher demagnification and a larger area light reception, surface curvature becomes steeper, thus, RADSI alone does not cover all mirrors. In order to resolve this matter, coordinate measuring machine (CMM) have been developed. In this study, the measurement performance of this CMM is discussed on the basis of the comparison with RADSI.
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