Open Access Presentation
22 February 2021 Heidelberg Instruments Mikrotechnik GmbH: ULTRA: The semiconductor laser mask writer
Author Affiliations +
Abstract
The ULTRA specifically addresses the production of mature semiconductor photomasks. It provides an economical mask writer solution with all the features you require for high throughput, high precision and structure uniformity, and extremely accurate alignment. With its modern, compact build, you can easily incorporate the system into an existing mask shop infrastructure. Mature photomasks continue to be a vital component in semiconductor device fabrication, being used in power management, microcontrollers, LED lighting, the IOT, MEMS, the automotive industry, to name but a few. The ULTRA serves this market with structure sizes down to 500 nm and write speeds up to 325 mm2 or 580 mm2 per minute depending on write mode, while featuring excellent values for CD, image quality, overlay, and registration.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthias Wahl "Heidelberg Instruments Mikrotechnik GmbH: ULTRA: The semiconductor laser mask writer", Proc. SPIE 11669, Advanced Lithography 2021: Exhibitor Product Demos, 1166903 (22 February 2021); https://doi.org/10.1117/12.2595424
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