JSR Micro, Inc.: JSR patterning materials for semiconductor manufacturing

Ramakrishnan Ayothi

doi:10.1117/12.2592994

22 February 2021 JSR Micro, Inc.: JSR patterning materials for semiconductor manufacturing

Ramakrishnan Ayothi

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Proceedings Volume 11669, Advanced Lithography 2021: Exhibitor Product Demos; 1166904 (2021) https://doi.org/10.1117/12.2592994
Event: Advanced Lithography Exhibitor Forum, 2021, Online Only

Abstract

JSR developed family of photoresist, topcoats, underlayer materials and process chemicals for semiconductor manufacturing. JSR’s high performance lithography materials are utilized in various critical and non-critical lithography applications. JSR underlayer materials are key enabler of complex patterning schemes at advanced technology node. JSR is also a leader in process chemicals solutions including advanced cleans technology, materials for packaging and CMP materials. Our process materials solutions are essential part of advance semiconductor manufacturing.

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Ramakrishnan Ayothi "JSR Micro, Inc.: JSR patterning materials for semiconductor manufacturing", Proc. SPIE 11669, Advanced Lithography 2021: Exhibitor Product Demos, 1166904 (22 February 2021); https://doi.org/10.1117/12.2592994

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