Fast optical phased array on a 300-mm silicon platform

C. Barrera; S. Guerber; D. Fowler; S. Monfray; A. Montagne; A. Myko; P. Grosse; K. Ribaud; P. Lemaitre; S. Cremer; I. Charlet; L. Vivien; F. Boeuf

doi:10.1117/12.2582776

5 March 2021 Fast optical phased array on a 300-mm silicon platform

C. Barrera, S. Guerber, D. Fowler, S. Monfray, A. Montagne, A. Myko, P. Grosse, K. Ribaud, P. Lemaitre, S. Cremer, I. Charlet, L. Vivien, F. Boeuf

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Proceedings Volume 11690, Smart Photonic and Optoelectronic Integrated Circuits XXIII; 1169007 (2021) https://doi.org/10.1117/12.2582776
Event: SPIE OPTO, 2021, Online Only

Abstract

We present an optical phased array parameter analysis for automotive and handheld device applications and preliminary results from a 1×16 silicon optical phased array using p-i-n phase shifters built on a 300-mm industrial platform to reach high-speed operation and low power consumption at a 1.55𝜇𝑚 wavelength. Using 2 𝜇𝑚-spaced grating antennas OPA with theoretical beam steering range of 48°, we demonstrate a beam steering range of ±4° while average power consumption after the beam-shape optimization is measured to be 12.6 mW. Experimental setup, beam forming and scanning are discussed and a final analysis on future large-scale OPA integration is made.

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C. Barrera, S. Guerber, D. Fowler, S. Monfray, A. Montagne, A. Myko, P. Grosse, K. Ribaud, P. Lemaitre, S. Cremer, I. Charlet, L. Vivien, and F. Boeuf "Fast optical phased array on a 300-mm silicon platform", Proc. SPIE 11690, Smart Photonic and Optoelectronic Integrated Circuits XXIII, 1169007 (5 March 2021); https://doi.org/10.1117/12.2582776

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