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Large-scale waveguide ring resonators are key elements in micro-optical gyroscopes. In this paper, by using the nondegenerate two-photon laser lithography technology, we fabricated a silicon nitride waveguide ring resonator on the SiO2 substrate with a coupling distance of 600nm. The FSR of the WRR we prepared is 10GHz, the finesse of the WRR is 2.3, and the Q value is 4.5ⅹ104 . The fabrication process shows the ability that femtosecond laser lithography can be processed on an insulating substrate at the nanometer scale.
Zuo Feng,Yuming He,Weihua Han, andZhaofeng Li
"Fabrication of large-scale silicon nitride resonator by femtosecond laser", Proc. SPIE 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics, 117172N (2 December 2020); https://doi.org/10.1117/12.2587336
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Zuo Feng, Yuming He, Weihua Han, Zhaofeng Li, "Fabrication of large-scale silicon nitride resonator by femtosecond laser," Proc. SPIE 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics, 117172N (2 December 2020); https://doi.org/10.1117/12.2587336