0Substrates for HTS Films

Randy W. Simon

doi:10.1117/12.965143

19 March 1990 Substrates for HTS Films

Randy W. Simon

Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965143
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

The novel physical properties of high-temperature superconductors (HTS) have placed unusually severe requirements upon substrate materials to be used for thin film applications. To date, the highest quality thin films have only been produced upon a limited class of crystalline substrate materials while film properties have generally been at best mediocre on most conventional substrates. The ongoing development of in situ film deposition techniques has improved this situation to some extent and the further evolution of film processing promises to expand the selection of useful substrates for HTS films and devices. In this paper we review the current status of substrates for HTS thin film electronic applications and discuss a number of issues pertaining to substrates that continue to play a significant role in the development of HTS thin film technology.

Citation Download Citation

Randy W. Simon "Substrates for HTS Films", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965143

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